二手 ACCUTHERMO AW 610 #9185462 待售

ACCUTHERMO AW 610
ID: 9185462
晶圆大小: 2"- 6"
Rapid thermal processing system, 2"-6" Main frame with wires Pentium® class computer with LCD monitor, 17" Mouse and standard keyboard Aluminum oven chamber Water cooling passages Gold plating plates Door plate with TC connection port Isolated quartz tube without pyrometer window / with pyrometer window Oven control board Main control board Bottom and top heating with 21 (1.2kW) radiation heating lamp module (4) Bank zones: Top: Front and rear Bottom: Front and rear Quartz tray: 4" to 6" Round wafer / Customized Gas line with gas MFC without shut-off valve T-Shape quartz with qualified K-type TC Holder: 100°C-800°C Temperature measurement Thermocouple wires: (5) pcs Ramp up rate: 10°C to 120°C/sec Maximum rate: 200°C Steady state duration: 0-300 sec/step Ramp down rate: 10°C to 200°C/sec Steady state temperature range: 150°C - 1150°C Maximum: 1250°C ERP Pyrometer: 450-1250°C With ±1°C accuracy Thermocouple: 100-800°C with ±0.5°C accuracy Temperature: Repeatability: ±0.5°C Uniformity: ±5°C across, 6" Gases used: N2 O2 Ar He Forming gas NH3 N2O2 Options: MFCs with extended gas Box and gas control board Carrier or susceptor: Small sample Transparent substrate Substrate with metal thin film on top Patented ERP pyrometer (400-1250°C) Non-contact high temperature sensor Chiller for ERP pyrometer Single point for pyrometer calibration Omega meter for pyrometer and thermocouple calibration Shutt-off valve for quartz tube Lamps cooling control Spare parts Type: Atmospheric RTP RTA Desktop Manual loading PC Controller with real time control technology Lamp heating: Top and bottom (21) Lamps (4) Lamp zones: 3 Phase (2) Lamp zones: 1 Phase Isolated quartz tube Gold plating plates: Top Bottom Front Rear Left Right Water cooled oven chamber Substrate size, 6" Substrate thickness: <7 mm Substrate material: Transparent Semitransparent Nontransparent Substrate shape: Round / Square / Abnormity Highest temperature: 800-1250°C Temperature sensor: TC Longest steady time @1000°C: 5mins Vacuum pressure control: No Chamber cooling: Maximum: 35°C Dew point: 3°C Pre-filtered water Susceptor material: Graphite with SiC coating / Customized Options: Temperature sensor: ERP Omega meter: CL23A Susceptor: Base and cover Gas line: 1 Dimension: 17”x18”x11” (DXWXH) Gas line: 2 tot 4 Dimension: 17”x26”x11” (DXWXH) Gas line: 5 to 6 Dimension: 17”x30”x11” (DXWXH) Power : 1 Phase / 3 Phase 50/60 Hz AC 200V, 208V, 220V, 380V, 415V Amps: 70 / 100 CE Marked.
ACCUTHERMO AW 610是为高温热处理和实验室应用而设计的电炉/炉。该设备适用于各种材料和部件的预热、退火、回火和类似操作。AW 610能够加热到1100 °C的温度,并且能够精确控制过程的温度,直至用户当前编程或手动调整的设定点。它还具有两个独立的加热元件,用于惰性和氧化大气。ACCUTHERMO AW 610具有高品质的不锈钢内室,内室有两侧的耐火材料,吸收热量并保护加热元件。该室有两个铰链门,内门容易拆卸,便于装卸待处理材料。建造AW 610是为了给使用者和舱室提供最大的安全。它装有过温保护装置,在炉子前部装有复位按钮。它也有两个限位开关,一个在腔室的下层,第二个在腔室的上层,在过温或低层的情况下会停止加热器。这个烤箱/炉还有一个先进的控制系统,它包括一个触摸屏液晶显示屏,方便访问所有的控件和设置。可以根据工作温度、大气、停留时间等参数进行编程。其他特点包括力冷却、真空泵、互锁系统和安全锁。ACCUTHERMO AW 610是一种用途广泛、可靠的设备,适合用于实验室、研究和特定行业的应用。高效、准确的温度控制系统保证了在所有条件下的良好和可重现的效果。设备价格也合理,附带一年保修。
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