二手 THERMAL TECHNOLOGY SAS-2000 #293597792 待售

High temperature furnaces Heating system power leads: Water cooled 350 MCM Size Operating temperature: 2200°C Hot zone operating temperature uniformity: ±2°C Maximum change weight: 1000 Ibs Vacuum level: 10 Torr Horizontal Front loading with motorized hinge front door Automatic pneumatic clamping Manual opening rear door System frame / mezzanine suitable for clean room integration Double wall water cooled stainless steel chamber Doors and pump line Metal shielded hot zone: Tungsten / Molybdenum shields Diffusion pumped, 10" With mechanical roughing pump Water cooled inlet baffle Technical: Chamber materials: 304 L Polished interior surfaces Chamber ports: Electrode ports: 24 on chamber, 3 on each door Thermocouple and spare: (18) NW16 on chamber (2) Door NW40 on pump line Heaters: Tungsten mesh panels Hot zone effective size: 16" x 16" x 36" (5+ cu ft) Control system: Siemens PLC based Heating zones: (6) Top bottom (2) Sides (2) Ends Safety, Alarms, Interlocks: Vacuum Water flow Air pressure Over temperature Single enclosure: (4) 70 KVA transformers (2) 35 KVA transformers Thermocouples: (6) Types C Control Type C Over temperature Vacuum gauge: 1000 Torr Cold Pump down (Clean and dry chamber): 45 Minutes to 5 m torr Gas system: (3) Circuits: Nitrogen Argon Hydrogen With mass flow controller, VCR Connection Cooling water circuit: (24) Active (3) Spares With flow and temperature monitoring Top zone 70 kVA with 10 and 12 volt taps Bottom zone 70 kVA with 10 and 12 volt taps Left zone 70 kVA with 18 and 21 volt taps Right zone 70 kVA with 18 and 21 volt taps Front zone 35 kVA with 15 and 18 volt taps Rear zone 35 kVA With 15 and 18 Volt taps UPS For emergency shutdown: 24 VDC, 20 A. Diffusion pump power supply: 230 VAC, Single phase, 20 A Mechanical pump power supply: 230 VDC, 3 phase, 10 A Power supply: 350 kVA, 3 Phase, 6 Zone. 2014 vintage.