二手 ADVANCED ENERGY PDX-900-2V #9015849 待售

RF Generators Part Number: 3156024-030E Firmware Revision: E Power Requirements: 190 - 230 VAC ~, 50/60 Hz, 14.8 - 12.2A Applications: Plasma Etching/Deposition Reactive Ion Etching RF Sputtering DC Sputtering with RF Bias Physical Specifications: User Connector: 25-pin, male, subminiature-D RF Output Connector: Type N Load-Matching Output Connector: Type C Input Connector: Hubble 2621 (North America Only) Electrical Specifications: RF Output Power: 8 W minimum, 90 W maximum, accuracy is 1% of setpoint or 2 W, whichever is greater. Reflected Power: 250 W maximum (measured before loadmatch transformer Regulation: Load power regulation modes Harmonics: At 900 W at 350 kHz (into a 50 ohm load), all harmonics are nominally greater than 45 dB below the fundamental output frequency Frequency Range: 350kHz Output Voltage for 50 Ohm Output: 300 V maximum Output Voltage for Output A: 850 V maximum Output Current: 6.0 A maximum Load Impedance: 25 to 125 ohms (7 steps) loadmatch transformer Input Voltage: 200 to 230 V ac, 50/60 Hz, single phase Input Current: 10 A rms maximum at 200 V ac input Line Input Connection: 3-wire, 14 AWG with Hubble connectors (North America only. No line cord or connector is provided for European units) Internal Power Dissipation: 250 W maximum.