二手 ACCRETECH / TSK UF 200SA #9283882 待售
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ID: 9283882
优质的: 2005
Prober
Platform: J750 / J750EX
Floppy Disk Drive (FDD)
Magneto Optical (MO) Disk
Hard Disk Drive (HDD)
Control rack:
Z-Axis driver
XY Servo drivers
Power control board
Video interface board
Power supply: (2) 24 V, 12 V, -12 V, 5 V, 48 V
VME Rack:
Slot / Board
Slot 1 / Master CPU
Slot 4 / VGA Card
Slot 5 / VGA Card
Slot 6 / COGNEX Board
Slot 8 / PIO Board
Slot 10 / GPIB Board
Slot 11 / 5-Channel PGEN board
Slot 13 / -
Slot 14 / DISP Sensor
Slot 15 / -
Slot 16 / Slave CPU
Slot 17 / Loader I/O
Slot 18 / Loader PGEN
Read side:
Driver board
F-Server driver
Theta server driver
(2) Fans
Loader side:
Loader driver board
OCR Camera
Loader sensor board
Loader axis board
Cassette cover
Elevator motor driver
Sub-chuck rotation motor driver
Turntable motor driver
(2) Transfer motor driver arms
Pre-alignment sensor
(2) Arms
Sub-chuck
Inspection tray
Temperature controller
Elevator / Clamper
Chuck top
Z-Unit
(2) XY Axis screw and motors
F-Axis screw
E1, E2 Camera module
Touch panel
Keyboard and joystick
Keyboard control board
Alarm lamp pole
Hinge: 300L
Miscellaneous:
Free stopper (Cassette cover)
Valve
Tie rod for loader / Main body
2005 vintage.
TSK/Tsubaki-UFS 200SA Prober是业界领先的自动化激光干涉仪,用于电气和机械测量。该设备采用高分辨率测量头设计,具有超低Z轴轮廓,为测试和测量半导体晶片及相关元件提供卓越的精度和精确度。ACCRETECH/TSK UF 200SA Prober利用高精度激光干涉仪测量半导体晶圆厚度、平坦度、平面度和弓形的最小变化,精度和精确度更高。该系统还配备了新颖的三维对准技术和多重驱动单元,使其能够在多种基板和半导体晶片上进行高精度和重复性的测量。此外,它的整体自动对焦机允许用户以高精度和重复性测量晶圆表面的小细节。TSK UF200SA Prober的占地面积很小,非常适合在拥挤的实验室环境中使用。它还具有总共八个增量编码器,使它能够感知晶圆不对齐和自我校准,以确保从样本到样本的最高精度和可重复性。此外,此工具还提供了集成的自动校准功能,可帮助确保对互连和未对准的设备进行高精度的测量,并具有广泛的机械范围和提高的操作速度。ACCRETECH UF 200 SA Prober配备了多个软件包,用于高效操作,包括高精度公差、晶圆变薄、晶圆扭曲校正软件,以确保高精度读数。这些软件包使prober能够自动准确地适应变化的样本和条件,大大提高了精度和重复性。UF 200 SA Prober是一款用于半导体制造的功能强大的工具,它为用户提供了业界领先的准确性和可重复性,占地面积很小,使其成为要求苛刻的实验室的理想选择。它小巧可靠,非常适合高精度和快速测量,提供卓越的性能和效率。
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