二手 SEMISHARE SX12 #9259731 待售

Automatic DC probe station, 12" Sealed micro chamber EMI / Light / Noise Chuck, 12" with central vacuum hole Vacuum rings for sample holding Super low noise tri-axial chuck Output tri-axial adapter Chuck flatness: 5µm Chuck quick roll out mechanism for fast wafer exchange Probe card and probe card holder are adaptable to platen Platen can load up to (12) micro-positioners EMI Shielding: > 30 dB (Typical) at 1 kHz to 1 MHz Light attenuation: 130 dB Spectral noise floor: ≤ -180 dBVrms/rtHz (≤ 1 MHz) System AC noise: ≥ 5 mVp-p (≤ 1 GHz) Optimized microchamber for less CDA consumption Chuck XYZ-Theta 4 Axes High precison motorized stage Controlling system Travel range: 350 x 500 x 20 mm X, Y, Z Direction motion resolution: Minimum 0.1 microns Repeatability: ± 1µm Accuracy: ± 2µm Chuck angle rotation range: ± 10° Theta resolution: 0.0001° Theta repeatability: 0.0005° Theta accuracy: 0.001° Maximum speed: X/Y Axis: 70 mm/s Z Axis: 20 mm/s Chuck driver mechanism: Zero backlash design Grinded ball screw and linear guide rail Chuck stage axes: Linear scale resolution: 0.1 µm Microscope XYZ motorized stage and controlling system Microscope XYZ travel: 2" x 2" x 5" Maximum speed: > 10 mm/s Computer connection port: RS232/485 TCP/IP GPIB Motors: Low noise DC motor Anti-vibration table SEMISHARE 3 Zoom High resolution long working distance microscope Three-speed zoom microscope 15:1 Display low magnification: 0.6x Display high magnification: 2.5x / 9x Microscope focus block: Z Travel: 50.8 mm Resolution: 1µm (2) CCD Adapters inside C Mount adapter High power white light source: 150 W Objective: 5x WD: 34.0 mm NA: 0.14 Visual magnification: 120-1,800x (2) Industrial HD (2 Million pixels) CCD SONY CMOS 2/3" Resolution: 1920 x 1200 Frame: 30 fps GigE Interface (2) SEMISHARE SS-100 Micropositioners Magnet base with switch Linear XYZ travels: 12 mm Linear motion Probing Inclination: 0-30° Accuracy: 0.7 microns (2) AMERICAN PROBE & TECHNOLOGIES 74CJ-APT-KS Kelvin coaxial probe holders One probe tip Tip radius: 0.5/1.5/5/10/12.5/15/20 um AMERICAN PROBE & TECHNOLOGIES 73CT-APTA Replaceable coaxial probe Tip radius: 0.5/1.5/5/10/12.5/15/20 um MEDO VP 125 Silent oil-free vacuum pump 7 l/min Air compressor Noise level: 52dB.