二手 TEL / TOKYO ELECTRON P-8 #293751088 待售
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ID: 293751088
晶圆大小: 4"-8"
优质的: 1996
Prober, 4"-8"
Top loader
D204 Gold chuck without chiller
Head plate, 8"
KLA OCR
Polish pad: 50 mm
GPIB
RS232
X, Y, Z Probing accuracy: ±2.0 µm
Stage technology: Ball screw
Chuck temperature: 180°
Clean and dry air supply:
Flow amount: 18 L/min
Pressure: 400 kPa to 700 kPa / 60 to 100 psi
Connection: 1/4"
Vacuum:
Pressure: -400 mm Hg
Flow amount: 15 L/min
Connection: 1/4"
Input Power:
Single phase: 120 VAC, 30 A (Wired for a 30 A Single phase cord-cap)
2 Phase: 220 VAC, 15 A
Operating system: VME
1996 vintage.
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