二手 VEECO FPP 5000 #128113 待售
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ID: 128113
Four point system
Compact integral probe and display
Microprocessor based electronics
Automatic ranging
Four selectable displays
Sheet Resistivity
V/I
Bulk resistivity of a slice with a known thickness
Thickness in, A, MILS, or microns of a slice or layer with a known bulk resistivity
Keyboard Programming of slice or layer thickness or bulk resistivity
Automatically performs a reverse and forward measurement each time the cover is closed
RETEST button allows additional measurements without disturbing the probes
Automatically holds the last reading after the probe is released and until the next measurement is made
Error code displays indicate improper operation, readings and electronics
Extended measurement range displays sheet resistivity up to 450k ohm/sq and down to a resolution of .001 milliohm/SQ
High accuracy of 0.5% of reading on all reading between 5 milliohm to 5 k ohm. No more than +/- 8.0% at the extreme limits of the range
Self test circuitry built in to determine if a fault is present
Self calibration and zero circuitry assures high accuracy in all but extreme ranges
Index substrate holder allows repeatable probe positioning on the substrate
Probe up permits repeatable measurements independent of operator force and substrate thickness
Integral RFI and light shielding for high resistivity measurements
Plug in probe head adaptors make probe head changing convenient and non critical
Typing mode determines N and P typing for most semiconductor substrates or layers
Penetration permits high energy pulse to be applied for the purpose of breaking through thin oxide layers
Penetrate function can be disabled by means of internal switches
Automatic calculation of correction factors to compensate for probe tip spacing variations
Back lit front panel indicates only the units applicable for the mode of operation chosen
Electrical Specifications:
The FPP-5000 requires an input power of 115/230 VAC +/- 10%, 50/60 Hz, at approximately 30 watts
Geometric Correction Range:
Based on the 2 configuration technique. Displays if calculated geometric correction is between 4.18 and 4.82
Calculated values above and below results in a flashing display in display SHEET, SLICE, and THICK
If as a result of the calculation, the intermediate results are negative, the display will indicate E 07.
Optional RS-232C Interface: Output on 25 pin female subminiature "D" connector
Selectable Baud Rate: 9600, 4800, 2400, 1200, 300, 150
Optional Hand Held Probe Head: For testing wafers over 6" in Diameter. Comes with six foot cable. Specify probe head when ordering.
VEECO FPP 5000是为高级探测解决方桉设计的高精度prober。VEECO FPP-5000设计用于广泛的行业,包括半导体、光学和电子。它具有许多功能和技术,使FPP 5000能够获得更高的准确性和分辨率,并为测试和检查提供可靠的手段。FPP-5000从精确的机制和先进的软件开始。它采用了精密的XYZ线性、电动级.该级由单独的伺服控制、无刷直流(DC)电动机驱动,提供400mm/s的最大行进速度。这允许快速、准确的扫描,从而产生高吞吐量。该程序还采用了多种技术,进一步提高了数据采集的准确性。其中包括一个单色仪控制的聚焦激光点,该点具有8倍或4倍的显微镜物镜,可分辨率降至微米;高数值光圈(NA)透镜,可实现超低Z轴分辨率;以及高分辨率的数字电荷耦合器件(CCD)相机。这种技术组合提供了以无与伦比的精确度快速捕获和分析图像的能力。驱动VEECO FPP 5000的软件也对其性能起着关键作用。它能够控制高速级的运动,以及允许高分辨率成像的多种技术。扫描软件可用于选择数据采集区域、分辨率、光束聚焦和其他扫描参数。VEECO FPP-5000是需要可靠、准确的高级探测解决方桉的用户的理想选择。其精密的机械设计和高科技的成像技术组合使其非常适合各种行业。此外,它的高级软件允许将FPP 5000与一系列应用程序配合使用,从而确保获得最佳效果。
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