二手 ALLWIN21 AW 105R #9201878 待售
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ID: 9201878
晶圆大小: 2"-6"
Plasma etcher, 2"-6"
Wafer loading: 3-Axis robot
Stationary cassette plate
Plasma power: 600W Air-cooled
Type: Parallel / Single wafer process
Gas lines: 1-3 Lines MFCs
Main frame with circuit breakers, solenoid valves
Keyboard, mouse, cables
Anodized reactor with door
Chamber base plate with water sensor
Upper and lower electrodes
Quartz showerhead & diffusion disk
Main control and distribution PCBs
RF Matching network with PCBs
RF Generator: 13.56MHz
Center aligner / Cassette station:
Two dimensions
Four dimensions
Base plate and ceramic ring:
Reactor
Chuck
In-line filter and solenoid isolation valve:
One MFC
Two MFCs
Three MFCs
AC/DC Box: Temperature controller
MKS Baratron: Isolation valve
Throttle valve
Main vacuum valve
Front EMO, interlocks
Touch screen GUI, 15"
Asher rate: 0.5-1.5 um/Min (200 to 250 ºC)
Bulk strip: 600 A/Min (100 ºC)
Uniformity: <±8% (Max-min)
Strip: <±5% (Max-min)
Particulate: <0.05/cm2
Selectivity: >1000:1
MTBF / MTTA / MTTR: 450 Hours / 100 Hours / 3.5 Hours / Better
Production-proven plasma asher / Descum
Uniformity: Up to 3%-5%
Frontside and backside isotropic removal
Consistent wafer-to-wafer process cycle repeatability
Element heating: Up to 250°C
Wafer capability (50mm-150mm): Up to 6.25” substrate
Thickness wafer: 50um
Options:
End-of-process (EOP)
Vacuum pump
Chiller: Chamber base plate
Applications:
GaAs, InP, GaN, SiC Wafer strip
GaAs, InP, GaN, SiC Wafer descum
Thin film head resist cleaning
Opto-electronic devices cleaning
MEMS
Photoresist stripping:
High dose implant
Rework
Post-polysilicon
Post-metal
Post-oxide
Controlled resist removal:
Post-develop descum
Uniformity capability: (<5% 1σ)
Plumbed process gases: O2, N2
Cooling water: GPM House circulating supply
Facility exhaust: 100 CFM
Power: 190-240VAC, single phase, 30A, 50/60Hz.
ALLWIN21 AW 105R快速热处理器是一种精确的热处理设备,非常适合广泛的研究和工业应用。最先进的设备采用坚固的石墨加热块,在高达1250°C的温度下具有一致的性能,并采用超精度温度控制器,在操作过程中提供无与伦比的精度和稳定性。AW 105R的设计可实现快速加热和冷却周期,平均时间为5分钟。这样可以在不牺牲精度的情况下对任何尺寸的材料进行高效的加工。ALLWIN21 AW 105R采用额定功率为8.5kW,具有独特的联锁门系统,在操作过程中最大限度地提高安全性。该单元包括直观的图形用户界面、真空-热学过程控制以及风速计/湿度计,以确保安全清洁的过程环境。该机设计方便维护,操作高效。AW 105R Rapid Thermal Processor具有简单的真空抽水工具和独立温度测量的高质量石墨加热块。借助全自动控制面板,用户可以以最小的安装速度快速启动和运行。ALLWIN21 AW 105R配备了强大的电动舞台和各种配件,包括石英室、提升装置和多个晶圆高度。该资产与多种材料基板兼容:硅片、聚合物薄膜、碳纳米管阵列、生物传感器等等。AW 105R能够在微机电系统(MEMS)条件下进行处理,并使用傅立叶变换红外(FT-IR)分析仪来确保获得样品的最高质量分析。整个机器是模块化的,设计以适应各种未来的发展。简而言之,ALLWIN21 AW 105R Rapid Thermal Processor是那些希望快速处理各种材料且具有完全精确度和温度控制的人的理想设备选择。凭借其高额定功率和易于使用的特性,研究人员可以确保他们的样品完全按照要求进行处理,而不会牺牲任何精度水平。
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