二手 ALLWIN21 AW 901e #9201818 待售
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ID: 9201818
晶圆大小: 3"-6"
TTW Plasma etcher, 3"-6"
Wafer loading: 3-Axis robot
Stationary cassette plate
Plasma power: RF 13.56 MHz
Type: Parallel / Single wafer process
Through the wall (TTW)
Gas lines: 1-3 Lines
Throughput: 30-60 WPH, Process dependent
Temperature: 6-65ºC (±2 ºC) Capability
Gas lines: (4) Gas lines with MFCs
Etcher rate:
AW-901eR: 0-8000A / minute
AW-903eR: 0-4000A / minute
Process dependent
Uniformity: Up to ±3%, Process dependent
Particulate: <0.05 / cm2
Selectivity:
901eR: 2-20:1
AW-903eR: 2-20:1
Process dependent
MTBF / MTTA / MTTR: 450 Hours / 100 Hours / 3.5 Hours
Options:
EOP Module with PCB
GEM/SECS II Function
Lamp tower alarm with buzzer
Throttle valve pressure control
Vacuum pump
Chiller for chuck and chamber
Through the wall
Main frame, standard
Pentium class PC with
Keyboard
Mouse
USB
SW Backup
Cables
Chuck:3"-6"
Wafer aligner / Cooling station
3-Axis integrated solid robot:
H-Zero (Standard)
H1-7 x 10.5 (TTW)
Fixed cassette station:
Chuck assembly
901eR Non-anodized
903eR Anodized with flat
903eR Anodized with flat
903eR Non-anodized with flat
Reactor Assembly:
901eR Non-anodized
903eR Anodized
903eR Non-anodized
903eR High performance
Direct cooling
Non direct cooling
Pins:
Quartz
Ceramic SST
Centering ring:
Aluminum
Ceramic
Main control board:
Gas box with (4) inline gas lines, MFC, filters, and pneumatic valves
RF Matching network with PCB
RF Generator: 13.56 MHz
MKS Elite: 300 HD
MKS Elite: 600 HD
MKS Elite: 1000 HD
ENI ACG 3
ENI ACG 10
AC / DC Box
ATM Sensor
UPC Pressure control
225 SCCM: 901eR
2000 SCCM: 903eR
MKS Baratron with peumatic Iiolation valve
Main vacuum valves
Front EMO interlocks
Touch screen GU, 15"
AW-901eR AW-903eR
Material Etched Polysilicon / Nitride Oxide,SOG,Nitride
Main etchant gases SG6, O2 / SF6,O2 CHF3,SF6,He
Other gases CHCLF2 / None None
Pressure (mTorr) 200-450 / 250-350 1600-3000
RF Power (Watts) 100-250 / 200-300 400-600
Temperature (C) 30 / 30 23
AC Power:
AC Module: 200-240 VAC Selectable, 50/60 Hz, 3-wire single-phase
Temperature controller: 200-240 VAC, 50/60 Hz, 3-wire single-phase
Vacuum pump: 208-230 / 460 VAC, 60 Hz or 200-220 / 380 VAC, 50Hz, 3 Phase
RF Generator: 200-240 VAC
PC / Monitor: 115 VAC
Cabinet exhaust: 100 cfm.
ALLWIN21 AW 901 e是一种快速热处理器（RTP）,具有多种功能,使其在重流焊接应用中特别有用。在重新流动焊接中,焊料粘贴会套用到电路板和元件上。然后将组件放在板上，高温加热，以便熔化焊料，建立可靠的电气连接。AW 901e旨在提供快速热处理（RTP），具有快速循环时间和高温，非常适合这类应用。ALLWIN21 AW 901e的最高加热温度为350 °C，高于市场上许多其他RTP。这种高温确保焊料快速熔化，电气连接可靠。最大腔室尺寸为24 "x 24"，适合更大的应用。加热元件是陶瓷红外加热器，有助于降低能源成本，提供高温精度。该机组还配备了3个温度程序，允许在制造过程中具有灵活性。AW 901e的设计考虑了安全性和效率。该单元包括一个压力开关，在处理过程中确保适当的气压，这有助于防止火灾从错误的焊接。冷却系统旨在帮助最小化腔室中的温度梯度,从而确保组件不会过热和损坏。该装置还包括一个PID温度控制器，这有助于确保精确的温度控制和稳定性。ALLWIN21 AW 901 e效率高，供热均匀。由于其快速的循环时间，在重新流动焊接过程中可以显着降低人工成本。它易于使用,非常适合生产使用,低成本使其成为许多企业的一个有吸引力的选择。总体而言，AW 901e提供了高性能的RTP，加热时间快，加热均匀。最高温度为350 °C,非常适合重新焊接应用,它包括多种安全和高效设计的功能。它还具有成本效益和易于使用,对于希望简化焊接过程的企业来说,它是一个绝佳的选择。
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