二手 AMAT / APPLIED MATERIALS Vantage Radiance #293587166 待售
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ID: 293587166
Rapid Thermal Processing (RTP) system, 12"
Process: RadOx
(2) Chambers
Wafer type: SNNF
Platform type: Vantage 3.X
Position A and B: (V352) RadOx2
Chamber A and B process: Toxic RP
OHT WIP Delivery
Dual 2-slot active cool down station
E99 Docked reading capability
Load port: SELOP 7
Load port operator interface: Standard (8) lights
Configurable colored lights
Top air intake system
Upper E84 interface enabled OHT
Upper E84 PIO sensors and cables
E99 Carrier ID: TIRIS With RF
Operator access switch
4-Color configurable light towers
Interface A option
eDiagnostic
Out the back connection type: RP
Out the back connection H2
(2) Water cooling chambers
RP Integration hardware: Chamber A and B
Standard RAGB rear light tower
Vantage skin: (2) Toxic chambers
IPUP Transfer pump
Open loop tuner
MFC Type: STEC
Core anneal and RTO
Monitor 1: Flat panel with keyboard on stand, 17"
Monitor 2: Flat panel on stand, 17"
Monitor 1 and 2 cables: 25 ft with 16 feet effective
SEMI F47
Semi S2 compliance
RTP Chamber type: Radiance RadOx2, 12"
Technology option: Open loop tuner
MFC Type: STEC
Core anneal and RTO
Rotation type: WRLD Toxic
Low flow O2: 5 SLM
High flow O2: 50 SLM
Oxygen analyzer
H2:
High flow
Low flow
Side inject
No process N2 for flammable MNFLD
Gas pallet type: TOXIC RP Common gas pallet
No MWBC improvement kit
Chamber integration lines: RadOx2
RP Pump cable: 81 Feet
Base ring: RadOx2 base ring
Line 1 / N2 (N/O), 50 SLM
Line 2 / O2, 50 SLM
Line 3 / O2, 5 SLM
Line 6 / H2, 15 SLM, Side inject high flow
Line 7 / H2, 22 SLM, High flow
Line 8 / H2, 2 SLM, Low flow
Line 10 / N2 (P/P), 30 SLM Restrictor
Line 11 / He, 30 SLM
Line 12 / N2 (BP), 50 SLM
Line 13 / N2 (Maglev), 100 SLM
Docking station FST install kit
Does not include Hard Disk Drive (HDD)
2017 vintage.
AMAT/APPLIED MATERIALS Vantage Radiance是一款高性能、先进的快速热处理器,它采用创新技术来提高工艺稳定性,实现高温转换,并最大限度地提高芯片制造质量,同时显着缩短工艺时间。AMAT Vantage Radiance有能力在几秒钟内实现高达2000 °C的高温转变。这种极高的性能RTP还允许精确的温度控制。应用材料Vantage Radiance在整个加热区域具有更好的温度均匀性和更快的瞬态热响应时间。它还提供了一个宽广的操作窗口,允许更大的工艺温度范围,从而提供工艺灵活性。Vantage Radiance具有高效的过程控制功能,使设备能够监控温度分布,并具有可调的时间和温度安全边距,以增强系统控制。它的自动化功能有助于减少周期时间、提高可重复性并简化设备的设置和控制。其创新的辐射加热和对流冷却能力有助于保持温度分布均匀,具有高度的时间稳定性。这有助于提高热稳定性,降低因热冲击引起温度波动的可能性。AMAT/APPLICED MATERIALS Vantage Radiance的多区域温度控制和全面自动化功能有助于在过程中保持最高质量和一致性。本机还集成了多种先进的安全功能,保证了人员和设备的安全。利用其创新技术,AMAT Vantage Radiance能够在现代IC制造所需的温度下准确、快速地进行加工,有助于缩短循环时间,同时保持工艺质量。总体而言,APPLIED MATERIALS Vantage Radiance是一款高性能和先进的快速热处理器,具有创新的加热技术、全面的自动化功能和先进的安全功能。它旨在提供高度的温度均匀性和稳定性,同时帮助最大限度地提高芯片制造的质量和效率。
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