二手 STEAG / MATTSON / AST 2800 #101676 待售

RTP system, 8" Front side: Monitor - Front LCD Cassette station: 2 station Rotation disabled Cassette Size : 8" Cooling Station Dummy Station, not original but modified Pre Aligner Robot Endeffector, not original but modified Slot Sensor, missing Keyboard-Front Floppy Disc Signal Tower: 4 colors EMO switch Door Plate Back side: EOCU BLCU Control Rack 1 Power Supply 1 Power Supply2 Power Supply3 Power Supply4, missing MCU LCCU LCL1 LCL2 Control Rack 2, SLCU1, missing SLCU2, missing LVU, missing LCU1, missing LCU2, missing WCU1, missing WCU2, missing O2 Display TCA PCU PDCU PIO PDU PSU Control Rack 3, PVU1 PVU2 SMB PVC, missing DVU WVU, missing ILC Rack controller: Power Supply PWM1 PWM2 ILC POD INT (= STATUS) MIB SEC EPC 486 Gas box: N2 30 SLPM O2 10 SLPM, O2 100 sccm MFC & Gas Filter, NH3 10SLPM, Missing Ar 10 SLPM, Missing Temperature: Pyrometer Optic sensor Tube TC Service console: Touch Screen - Rear Keyboard - Rear, Missing IPC: Main Computer Vacuum pump: Vacuum pump, missing Sensor: O2 MFC Power Supply Display Meter O2 Sensor O2 Pump, missing Quartzware: Tube, Missing Tray, Missing Pin for tray, Missing Distribution plate(T), Missing Distribution plate(R), Missing Door aperture, Missing Elbow, Missing O2 sensor pipe, Missing Liner plate(Top), Missing Liner plate(Bot), Missing Hot Liner , Missing Edge guard ring, Missing Pin for cooling station, missing Other: UPS, n/a TC wafer(S-Type), Missing TC feed through Can be inspected.