二手 AMAT / APPLIED MATERIALS Centura ACP #293704588 待售
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ID: 293704588
晶圆大小: 12"
优质的: 2010
EPI System, 12"
(2) Chambers
EFEM
Factory interface
(2) TDK Load ports
YASKAWA Robot
Wafer aligner
ACM MF with batch L/L
FES
FIS
RTS
(2) Gas pallets
(2) Batch load locks
(2) Cooling stations
VHP Robot
Single arm
Facility tray
Upper frame
Cooling module
Gas panel remote with controller
Chamber AC Rack
UI Touch screen
Stand
H2/N2 Pallet
Cover
Door
Water box
Miscellaneous parts
Process kits
Chamber A:
HORIBA Z500 Mass Flow Controller (MFC)
Gases / Flow
H2 / 100 SLM
H2 / 30 SLM
HCL / 500 SCCM
PH3 / 500 SCCM
HCL / 20 SLM
DCS / 500 SCCM
Chamber C:
UNIT INSTRUMENTS Mass Flow Controller (MFC)
Gases / Flow
H2 / 100 SLM
H2 / 30 SLM
HCL / 500 SCCM
PH3 / 500 SCCM
HCL / 20 SLM
DCS / 500 SCCM
2010 vintage.
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