二手 AMAT / APPLIED MATERIALS Centura AP eMax CT #9371704 待售

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图为 已使用的 AMAT / APPLIED MATERIALS Centura AP eMax CT 待售
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反应器
製造商
AMAT / APPLIED MATERIALS
模型
Centura AP eMax CT
ID: 9371704
晶圆大小: 12"
Dielectric etcher, 12" Process: Cu Wafer type: Notch Carrier: FOUP (3) Load ports (4) Chambers TDK Corrosion resistant loader module Alcatel IPUP Does not include Hard Disk Drive (HDD) Facility plate: N2 Regulator Manual valve Pressure gauge Loadlock pressure monitor: Gauge convectron: 1MTORR-1000TORR 1 / 4FVCR DNET Transfer pressure monitor: Gauge convectron: 1MTORR-1000TORR 1 / 4FVCR DNET 5 SLM N2 MFC Signal towers: Kit 4 Lights Devicenet light tower Cable: Monitor cable, 15 feet / 50 feet Pump cable, 75 feet Monitors: Monitor 1: Flat panel with keyboard Monitor 2: Remote flat panel Chamber configuration: Process kits: Qt / Si Gas inject: 3.5 Anodized SGD Chamber O-Ring: Chamraz 513 ALCATEL / ADIXEN / PFEIFFER ATH 1600M Turbo pump RF Match: DAIHEN RF Generator: ENI GHW 50 EPD Windows: Quick remove released quartz CM Test port: 1/2 VCR and KF25 Dual RGA Port: RGA port Endpoint type: H.O.T Endpoint Endpoint wavelength 1: CO 484 NM Endpoint wavelength 2: CN 387 NM Cathode temperature monitor ESC Power supply: CT HV RF Feed: Direct CT Cathode Dry pump: EABARA-ESR80WN Wall chiller: SMC-H2010 Cathode chiller: SMC-INR 496-003D Coolant: HT110 ESC type: ESC, Assembly, 12" , Dual electrode, IA Liner: CT Liner Process gas box configuration: Chamber A: Gas name / MFC Type size NF3 / FC-PN980CR1BA-100 CH3F / FC-PN980CR1BA-50 CH2F2 / FC-PN980CR1BA-50 O2 2000 / FC-PN980CR1BA-2000 O2 50 / FC-PN980CR1BA-50 O2 20 / FC-PN980CR1BA-20 N2 / FC-PN980CR1BA-200 CHF3 / FC-PN980CR1BA-200 CF4 / FC-PN980CR1BA-200 AR 300 / FC-DN780C-BA-300 Chamber B: Gas name / MFC Type size C4F6 / FC-PN980CR1BA-150 C4F8 / FC-PN980CR1BA-50 CO / FC-PN980CR1BA-500 CH2F2 / FC-PN980CR1BA-50 O2 2000 / FC-PN980CR1BA-2000 O2 50 / FC-PN980CR1BA-50 N2 / FC-PN980CR1BA-200 CHF3 / FC-PN980CR1BA-200 CF4 / FC-DN780C-BA-200 AR 300 / FC-DN780C-BA-300 Chamber C: Gas name / MFC Type size C4F6 / FC-PN980CR1BA-150 CH2F2 / FC-PN980CR1BA-50 O2 2000 / FC-PN980CR1BA-2000 O2 50 / FC-PN980CR1BA-50 O2 20 / FC-PN980CR1BA-20 N2 / FC-PN980CR1BA-200 CHF3 / FC-PN980CR1BA-200 CF4 / FC-DN780C-BA-200 AR 200 / FC-PN980CR1BA-200 AR 1500 / FC-PN980CR1BA-1500 Chamber D: Gas name / MFC Type size C4F6 / FC-PN980CR1BA-150 CH2F2 / FC-PN980CR1BA-50 O2 2000 / FC-PN980CR1BA-2000 O2 50 / FC-PN980CR1BA-50 N2 / FC-PN980CR1BA-200 CHF3 / FC-PN980CR1BA-200 CF4 / FC-PN980CR1BA-200 AR 200 / FC-PN980CR1BA-200 AR 1500 / FC-PN980CR1BA-1500.
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AMAT/APPLIED MATERIALS Centura AP eMax CT是一种专为光敏处理而设计的反应器。这种超高速热处理反应堆是一种先进的工具，旨在使用户能够受益于更快的蚀刻周期、精确的温度控制和精确的热测量。AMAT Centura AP eMax CT的自来水冷却设备使化学蚀刻室内的热扩散最小，从而对蚀刻过程中的晶圆温度提供高精度控制。借助先进的闭环反馈控制系统,用户能够按照规定精确地保持均匀的温度和过程持续时间。这样可以确保晶片不会受到温度的任何意外波动的影响,这些波动可能会对其加工的敏感材料造成热损坏。APPLIED MATERIALS Centura AP eMax CT还配备了先进的脉冲准分子源,可减少有害气体的排放,并最大限度地减少不良副产品的产生。此功能有助于确保蚀刻过程保持一致和可预测。该源还具有单向气流和快速晶圆传输单元，以帮助最大限度地减少颗粒数量和减少与清洁有关的停机时间。Centura AP eMax CT除了具有先进的技术能力外，还设计满足最高的安全标准。其强大的安全监测机器能够持续监测蚀刻过程，并能够检测到危险泄漏的存在。这确保了反应堆能够安全可靠地运行。AMAT/APPLIED MATERIALS Centura AP eMax CT是一种先进的蚀刻反应器，为用户提供可靠、高精度的蚀刻循环控制。其强大的功能有助于最大限度地减少热扩散和减少除气和颗粒计数。其安全监控工具确保持续监控蚀刻，使用户能够利用可靠、安全、高效的光刻蚀刻解决方桉。
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