二手 AMAT / APPLIED MATERIALS Centura DPS II #9213084 待售

Metal etchers Model Channel A, B: DPS II Channel C, D: AXIOM Chamber A, B: Model: DPSII metal Bias generator: AE Apex 1513 13.56 MHz, maximum 1500 W Bias match: AE 13.56 MHz,3 kV navigation Source generator: AE APEX 3013 13.56 MHz, max 3000 W Source match: AE 13.56 MHz, 6 kV navigation Lid: Ceramic lid, single gas nozzle Turbo pump: STP-A2503PV Throttle valve: VAT Pendulum valve DN-250 ESC: Dual zone ceramic ESC Endpoint type: Monochromatic Cathode chiller: SMC POU Wall chiller: SMC INR-496-016C Process kit coating: Anodize coating Cooling: HT 200 / FC 40 Chamber C, D: Model: ASP Source generator: DAIHEN ATB-30B Source match: DAIHEN SMA -3001 Throttle valve: Throttling gate valve ESC: Pedestal heater VODM Mainframe configuration: IPUP Type: ALCATEL A100L Gas panel type: NextGen VHP Robot: Dual blade MF PC Type: CL7 Factory interface configuration: Frontend PC type: 4.0 FEPC FIC PC Type: CPCI (3) Load ports Atmospheric robot: YASKAWA Track robot Side storage: Right side MFC Configuration: EWE-02A Gas name Max flow MFC type Gas 1 BCL3 200 SC-24 Gas 2 NF3 100 SC-23 Gas 3 - - - Gas 4 CL2 400 SC-24 Gas 5 C2H4/HE 400 - Gas 6 SF6 200 SC-24 Gas 7 O2 100 AANGD40W1 Gas 8 CF4 100 AAPGD40W1 Gas 9 AR 400 SC-23 Gas 10 N2 50 SC-22 Gas 11 N2 300 SC-24 Gas 12 CHF3 50 SC-23 EWE-02B Gas Name Max flow MFC type Gas 1 BCL3 200 SC-24 Gas 2 NF3 100 SC-23 Gas 3 - - - Gas 4 CL2 400 SC-24 Gas 5 C2H4/HE 400 - Gas 6 SF6 200 SC-24 Gas 7 O2 1000 SC-25 Gas 8 CF4 100 SC-23 Gas 9 AR 400 SC-23 Gas 10 N2 50 SC-22 Gas 11 N2 300 SC-24 Gas 12 CHF3 50 SC-23 EWE-02C Gas Name Max flow MFC type Gas 7 O2 10000 SC-27 Gas 8 CF4 300 SC-24 Gas 9 - - - Gas 10 N2 1000 SC-25 EWE-02D Gas Name Max flow MFC type Gas 1 - - - Gas 2 - - - Gas 3 - - - Gas 4 - - - Gas 5 - - - Gas 6 - - - Gas 7 O2 10000 SC-27 Gas 8 CF4 300 SC-24 Gas 9 - - - Gas 10 N2 1000 SC-25.