二手 AMAT / APPLIED MATERIALS Centura DxZ #120819 待售

CVD system, 8" Specifications: 208 Vac, 4 Wires, 3 phase, 250 A, 50/60 Hz System rating: 90 kVA Platform type: Centura I Body Application: Etch Wafer shape: SNNF Technology: CVD RPS: no (available for additional cost) Chamber type/ location: Position A: DXZ CHAMBER Position B: DXZ CHAMBER Position C: HDP CHAMBER Position D: Blank Position E: Blank Position F: (OA) ORIENTER System safety equipment: CE Mark: No EMO Switch type: Turn to release EMO ETI compliant EMO Guard ring included Smoke detector at controller: Yes Smoke detector at MF No skin: No Smoke detector at gen rack: Yes Smoke detector at AC Rack: Yes Water and smoke detector: Alarm System labels: English CH A: DXZ Chamber: Process Kit: Customer option Baratron guage: 100 Torr/ 10 Torr 　 Match: FIXED MATCH 　 Heater 　 　 Lift assembly: 0010-37792 　 Throttle valve: 0090-36296 　 Generator: AE RFG 2000-2V 　 　 　 　 CH B: DXZ Chamber: Process Kit: Customer option 　 Baratron guage: 100 Torr/ 10 Torr 　 Match: FIXED MATCH 　 Heater 　 　 Lift Assembly: 0010-37792 　 Throttle valve: 0090-36296 　 Generator: AE RFG 2000-2V 　 　 　 　 CH A: DXZ Chamber: Process Kit: Customer option 　 Baratron guage: 100 Torr/ 10 Torr 　 Match: FIXED MATCH 　 Heater 　 　 Lift assembly: 0010-37792 　 Throttle valve: 0090-36296 　 Generator: AE RFG 2000-2V 　 　 　 　 CH F: (OA) orienter: Orienter: Standard 　 　 　 　 Gas delivery options: Component selection: Standard Valve: VERIFLO Transducer 　 　 Regulator 　 　 Filter 　 　 Transducer displays 　 　 MFC Type: UNIT UFC-1660 　 　 　 　 Gas panel pallet A Line 1 Gas: C2F6 　 MFC Size: 300 SCCM 　 Line 2 Gas: NH3 　 MFC Size: 1 SLM 　 Line 3 Gas: NH3 　 MFC Size: 100 SCCM 　 Line 4 Gas: N2 　 MFC Size: 325 SCCM 　 Line 5 Gas: H2 　 MFC Size: 5 SLM 　 Line 6 Gas: N2 　 MFC Size: 5 SLM 　 Line 7 Gas: N2O 　 MFC Size: 2 SLM 　 Line 8 Gas: NF3 　 MFC Size: 1SLM 　 　 　 　 Gas Panel Pallet B 　 　 Line 1 Gas: C2F6 　 MFC Size: 300 SCCM 　 Line 2 Gas: NH3 　 MFC Size: 1 SLM 　 Line 3 Gas: NH3 　 MFC Size: 100 SCCM 　 Line 4 Gas: N2 　 MFC Size: 325 SCCM 　 Line 5 Gas: H2 　 MFC Size: 5 SLM 　 Line 6 Gas: N2 　 MFC Size: 5 SLM 　 Line 7 Gas: N2O 　 MFC Size: 2 SLM 　 Line 8 Gas: NF3 　 MFC Size: 1SLM 　 　 　 　 Gas Panel Pallet C 　 　 Line 1 Gas: C2F6 　 MFC Size: 300 SCCM 　 Line 2 Gas: NH3 　 MFC Size: 1 SLM 　 Line 3 Gas: NH3 　 MFC Size: 100 SCCM 　 Line 4 Gas: N2 　 MFC Size: 325 SCCM 　 Line 5 Gas: H2 　 MFC Size: 5 SLM 　 Line 6 Gas: N2 　 MFC Size: 5 SLM 　 Line 7 Gas: N2O 　 MFC Size: 2 SLM 　 Line 8 Gas: NF3 　 MFC Size: 1SLM 　 　 　 　 General mainframe options: Facilities type: Regulated　 Facilities orientation: FACILITIES BOTTOM CONNECTION 　 Optical character recognition: NO 　 Weight dispersion plates: NONE 　 Service lift: NONE 　 　 　 Loadlock/Cassette options Loadlock type: NARROWBODY 　 Loadlock platform 　 　 Narrow body loadlock extension: NOT APPLICABLE 　 Loadlock options: NONE 　 Cassette Type Supported: STANDARD 　 Loadlock Cover Finish: ANTI-STATIC PAINTED 　 Loadlock Slit Valve Oring Type: KALREZ 　 Wafer Mapping: ENHANCED(O.T.F) 　 Wafer Out of Cassette Sensor: NOT AVAILABLE 　 Cassette Present Sensor: NOT AVAILABLE 　 Integrated Cassette Sensor: YES 　 　 　 　 Transfer Chamber Options: Transfer Ch Manual Lid Hoist: YES 　 Robot Type: CENTURA HP ROBOT 　 Robot Blade Option: AL Blade 　 On the Fly Centerfind: YES 　 Wafer On Blade Detector: BASIC 　 Loadlock Vent: BOTTOM VENT 　 W Throttle Valve and Baratron: NO 　 HP Thruput Enhancement: NO 　 Clear Blank Off Plates: NO 　 　 　 　 Remotes: 　 　 Controller Type: 66 INCH COMMON CONTROLLER 　 Cntrlr Electrical Interface: BOTTOM FEED 　 Controller Exhaust: TOP EXHAUST 　 Controller Cover Option: YES 　 Adaptor for SECS Port 25 Pos: NO 　 Exhaust Duct: NO 　 Controller IO Interface: NONE 　 Three Way Switch Box: NO 　 　 　 AC Rack: Selected Option 　 GFI: 100mA 　 AC Rack Types: 66 INCH Pri/Sec AC GEN RACK 　 Exhaust Collar: NONE 　 Primary MCE AC Rack: NOT APPLICABLE 　 Secondary MCE AC Rack: NOT APPLICABLE 　 Controller Facility Interface: NO UPS 　 MCE Secondary Generator Rack: NOT APPLICABLE 　 　 　 　 Generator rack options　: RF On indicator: YES 　 RF Gen rack plexiglas cover: NO 　 Second RF On indicator: NO 　 Gen rack cooling water: Gen rack water manifold 　 Gen rack manifold facilities: NOT APPLICABLE 　 RF Generator flow meter: NOT AVAILABLE 　 　 　 　 1997 vintage.