二手 AMAT / APPLIED MATERIALS Centura DxZ #9046124 待售
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ID: 9046124
晶圆大小: 8"
优质的: 1996
(3) chamber CVD system, 8"
Specifications:
Platform type: Centura I Body
SBC Board: V452
Chamber Type:
Position A: DxZ Nitride
Position B: DxZ Nitride
Position C: DxZ Nitride
Position D: Blank
Position E: MULTI COOLDOWN
CH A: DxZ Chamber:
Baratron Guage: 10Torr / 1Torr
Match: AE 3155094-003A
Heater Lift: 0010-38426
RF Generator: RFG 2000-2V
EPD: 0500-01047
Heater Driver: 0190-09419
CH B: DxZ Chamber:
Baratron Guage: 10Torr / 1Torr
Match: AE 3155094-003A
Heater Lift: 0010-38426
RF Generator: RFG 2000-2V
EPD: 0500-01047
Heater Driver 0190-09419
CH C: DxZ Chamber:
Baratron Guage: 10Torr / 1Torr
Match: AE 3155094-003A
Heater Lift: 0010-38426
RF Generator: RFG 2000-2V
EPD:
Heater Driver: 0190-09419
CH E: Cooldown Chamber:
Type: Multi cooldown
Gas Delivery Options:
Component Selection: standard
Valve: Veriflo
Transducer: MKS
Regulator:
Filter:
Transducer Displays:
MFC Type: STEC 4400
Gas Panel: Pallet A:
Pallet
Gas Line Configuration:
Line 1: Gas NH3
MFC Size: 2 SLM
Line 2: Gas N2
MFC Size: 5 SLM
Line 3: Gas SiH4
MFC Size: 200 SCCM
Line 4: Gas NF3
MFC Size: 1 SLM
Line 5: Gas N2O
MFC Size: 1 SLM
Line 6: Gas CF4
MFC Size: 3 SLM
Line 7: Gas N20
MFC Size: 4V 239.7 SCCM / 2V 119.8SCCM
Line 8: Gas N2
MFC Size: 5 SLM
Line 9: Gas HE
MFC Size: 5SLM
Gas Panel: Pallet B:
Pallet:
Gas Line Configuration:
Line 1: Gas NH3
MFC Size: 2 SLM
Line 2: Gas N2
MFC Size: 5SLM
Line 3: Gas SiH4
MFC Size: 200 SCCM
Line 4: Gas NF3
MFC Size: 1 SLM
Line 5: Gas N2O
MFC Size: 1 SLM
Line 6: Gas CF4
MFC Size: 3 SLM
Line 7: Gas N20
MFC Size: 4V 239.7 SCCM / 2V 119.8SCCM
Line 8: Gas N2
MFC Size: 5 SLM
Line 9: Gas HE
MFC Size: 5SLM
Gas Panel: Pallet C:
Pallet:
Gas Line Configuration
Line 1: Gas NH3
MFC Size: 2 SLM
Line 2: Gas N2
MFC Size: 5SLM
Line 3: Gas SiH4
MFC Size: 200 SCCM
Line 4: Gas NF3
MFC Size: 1 SLM
Line 5: Gas N2O
MFC Size: 1 SLM
Line 6: Gas CF4
MFC Size: 3 SLM
Line 7: Gas N20
MFC Size: 4V 239.7 SCCM / 2V 119.8SCCM
Line 8: Gas N2
MFC Size: 5 SLM
Line 9: Gas HE
MFC Size: 5SLM
Transfer Chamber Options:
Transfer Ch Manual Lid Hoist: yes
Robot Type: Centura HP robot
Robot Blade Option: Ceramic Blade
Remotes:
Heat Exchanger: AMAT 0
1996 vintage.
AMAT/APPLIED MATERIALS Centura DxZ Reactor是一种单晶片化学气相沉积（CVD）设备,旨在提供卓越的沉积质量和延长刀具使用寿命。该系统采用模块化概念设计，允许用户根据生产需求定制设备。它具有一个具有独立驱动的定心和平移站的旋转敏感器平台，以确保晶片到晶片的均匀放置。它还有一个数字温度控制机器，带有一个独立的敏感器加热元件，能够在整个晶圆上实现均匀的热处理。该工具配备了通用多淋浴头，以确保独特薄膜的均匀沉积以及高通量。该工艺室采用高度真空密封的方式进行无污染操作，并包括一个净化资产，以进一步减少污染。AMAT Centura DxZ还配备了用于控制和监测过程气体的气体面板模型，以确保薄膜始终以优越的质量沉积。此外,还包括一个自动剥离机构,用于在维修、维护和升级过程中快速、方便地卸下薄膜。APPLIED MATERIALS Centura DxZ Reactor具有强大的设计和可靠的性能,是CVD在半导体和MEMS器件制造中的理想选择。
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