二手 AMAT / APPLIED MATERIALS Centura TPCC #293749953 待售

System, 8" Process: ISSG / DPN SMIF Chamber A (DPN): Material: Al-Si Coating RF Generator with power supply: 13.6 MHz, 20-1000 W Manometer MKS: 13.3 / 1333 Pa Manometer Torr: 1 / 10 Wafer cooling: He ESC Wafer holding Ground VDE BOC EDWARDS / SEIKO SEIKI STP-A1603C Turbo pump: 1600 Litres/sec No RGA Port N2 MFC Size: 1slm Chamber B (ISSG): Toxic chamber with exhaust: CHEMRAZ O-Ring No RGA No ISPM No oxygen analyzer Process capability: Gasses: O2, Ar, He, N2, H2 Oxidation capability GPM Controller ISSG / RPN No remote plasma Chamber purge option: 0021-35008 Reflector plate 0200-36118 Edge ring, Si-C 0200-03425 Wafer cylinder No reflector plate Gas pallet: O2 MFC: 5 / 20 slm Ar / He MFC N2: 1 MFC, 20 slm H2: 3 MFC, 1 slm / 10 slm Load lock / cassette: (2) Chambers Wide body Universal cassette platform Fast wafer mapping Light tower: Red, yellow, green Heat exchanger: Steelhead-3 (PM1) 2000 vintage.