二手 AMAT / APPLIED MATERIALS Centura Ultima HDP CVD #62203 待售

Etcher, 8" (2) Ultima chamber (1) Ultima plus chamber Technology :IMD      Wafer Size : 8"      Wafer Shape : SNNF (Semi Notch No Flat)      Software Version : B4.3.14      CHAMBER TYPE AND LOCATION      Ch A : Ultima HDP-CVD      Ch B : Ultima HDP-CVD      Ch C : Ultima + HDP-CVD      Ch E : Multislot Cool Down      Ch F : Orientor      CHAMBER A,B Ultima HDP-CVD :     Nozzle : Long/Long Side      Clean Gas Distribution : Baffle      Turbo Pump : Ebara ET1600WS w/ HVA      Wafer Temperature Monitoring : Yes      Top Gas Feed : Without Top O2      Dual Independent He Control : Standard 10/10 TORR      Clean Method : Microwave      CHAMBER C - Ultima + HDP-CVD :      Nozzle : Long/Long Side      Clean Gas Distribution : Baffle      Turbo Pump : Ebara ET1600WS w/ HVA      Wafer Temperature Monitoring : Yes      Top Gas Feed : Without Top O2      Dual Independent He Control : Standard 10/10 TORR      Clean Method : Top Mount      EXISTING ELECTRICAL REQUIREMENTS      Line Frequency : 60Hz      Line Voltage : 200/208V      Line Amperage : 600A Platform      EXISTING SAFETY EQUIPMENT :      EMO type : Turn to release EMO      EMO Guard Ring : Yes      System Labels : English w/Chinese Non-simplified      System Smoke Detector : Controller      EXISTING MAINFRAME :      Mainframe Type : Ultima HDP w/Multislot      Frame Type : Standard Frame      System Placement : Through the Wall      Mainframe Skins : No      Mainframe Exhaust Duct : No      Mainframe Facilities Connection : Back      Robot Type : HP Robot      Robot Blade : Ceramic      Loadlock Cassette : Narrow Body      Narrow body Loadlocks : Cassette Present Sensor      Loadlock Wafer Mapping : Basic      N2 Purge Type : STEC 4400MC 10 Ra Max      EXISTING GAS DELIVERY :      Gas Panel Surface Finish : Standard Gas Panel      MFC Type : STEC 4400MC 10 Ra Max      Valves : Fujikin 5 Ra Max      Filters : Pall Ni 10 Ra Max      Transducers : MKS w/ Display      Regulators : Veriflo      System Cabinet Exhaust : Top      Gas Panel Gas/Flow Direction Labels : Yes      APC Seriplex Cover : Yes      Gas Panel Doors : Solid      Gas Pallet Configuration :      Chamber A, B, C      Gas Stick/Process Gas/MFC size/Regulator/Transducer      #1 SiF4 100 Y Y      #2 O2 400 Y Y      #3 SiH4 200 Y Y      #4 Ar 300 Y Y      #5 SiH4 20 Y Y      #6 Ar 50 Y Y      #7 NF3 2000 Y Y      #8 Ar 2000 Y Y      REMOTES :      RF Generator Rack - Ultima Gen. Rack      ASTEX 80S09mW (3)      Quantity : Two      Ultima Stand-Alone RF Generator Rack : Yes      Generator Rack Cooling - RF Gen Rack Manifold with Quick Disconnect Ultima Gen Rack H20 Connection - Barbed Brass      Existing Heat Exchanger : SMC Thermo      Umbilicals :      System Controller Signal Cable Length : 55ft      RF Gen Rack Cable Length : 50ft      Ultima Stand-Alone Generator Rack : 98 ft      HX Hose Length : 50ft      HX Cable Length : 50ft      Pump Cable : 50ft      Ultima Microwave Generator Cable Length : 50 ft      Ultima WTM Cable Length : 32.8 ft (10m)      Vacuum Pumps, Exhaust Scrubber not included in sale Currently crated and stored      System Can be inspected 1999-2000 vintage.