二手 AMAT / APPLIED MATERIALS Centura Ultima Plus #9158337 待售
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ID: 9158337
晶圆大小: 8”
HDP Chamber, 8”
Includes:
Chamber interface parts
Gas pallet
QTY DESCRIPTION P/N
Upper chamber LID:
(1) RPS AX7670-02,06,16,19
(1) RPS Mount kit
(1) AL Gas line 0050-62134
(1) SiH4 Gas line 0050-46867
(1) Top heater 0035-00123
(1) Ceramic dome
(1) ALN Plate modification
(1) Balanced side match modification
(1) DTCU Modification
(1) Cap bank assy 0010-06403
(1) PLC Kit
(1) Ultima plus cover 0010-19262
(1) Top baffle 0200-01009
(0) Nozzles
(1) Top clean feed through 0040-86016
(1) Hinge assy
Lower chamber body:
(1) T/V Body 0020-18273
(1) Turbo throttle valve
(1) Turbo throttle Driver 0010-01369,19238
(1) Rough throttle valve 0010-09035
(1) Turbo isolation valve 3870-00117
(1) Fore line and gas line
(1) Bias match
(1) Ceramic collar 0200-18109
(1) Ceramic cover 0200-18081
(1) Cathode assy
(1) Cathode misc
(1) ESC Refurbish
(1) NC Gate valve 3870-00037
(2) RF Coaxial cable 0190-18062
(1) Ebara 1600 Turbo pump / Controller ET1600
(1) 1000 Torr manometer 1350-01131
(1) 50T Interlock switch 1270-01814 (E48W-H38)
(1) Chamber XDCR press .10-100TORR Ass'y 1320-01284 (CV7627A-05)
(1) Frorline XDCR press 10TORR Ass'y 1350-01285
(2) Gas spring 3780-02273
(1) Seal assy 3700-02320
(1) Throttle valve teflon ring 0200-18268
(1) Dual he manifold (4 Valve) 0050-40927
(1) DUAL IHC ASS'Y
(1) ORING
(1) Forline isolation valve 3870-02890 (KAV-150-P-10)
Main frame:
(1) Chamber pneumatic assy 0010-17301
(1) Chamber tray bd 0100-18062 or 18064/65
(1) Chamber tray kit 0242-01931
(1) AC Box kit 0242-70228
Generator:
(1) ENI Generator rack
(1) Seriplex bd 0190-35765/0190-35651
(1) Distribution bd 0100-18043
(1) Seriplex back plane 0190-09286
(1) Cardcage
Gas panel:
(1) Gas panel
(1) Gas panel refurbish
(1) Seriplex bd 0190-35653/0190-35762/0190-35651
(1) Distribution bd 0100-35124
(1) Seriplex back plane 0190-09286
(1) Cardcage
MISC:
(1) Clean, fitting, clamp
(1) Chamber frame
(1) MISC (GFCI, cable, accessory).
AMAT/APPLIED MATERIALS Centura Ultima Plus是一种前沿蚀刻沉积反应器，设计用于制造先进半导体器件。与前代产品相比,这种自动化设备提供了卓越的性能、更好的吞吐量和更大的统一性。反应堆室设计为极真空密封，使其能够在5E-7 torr的底压下运行，达到低至1E-8 torr的压力。AMAT Centura Ultima Plus还提供了范围广泛的温度设置，最高可达900°C，并且与各种蚀刻和沉积气体兼容，包括氢、氯、氮、氧和的。该反应堆的自动晶片处理系统确保晶片安全高效地传输。它同时具有单晶片和批处理功能,使操作员能够按顺序设置多个蚀刻过程。单晶片扫描功能允许对每个晶片进行单独的高分辨率控制和处理。APPLIED MATERIALS Centura Ultima Plus还提供永久安装的干式真空泵机,无需维护即可提供可靠的操作。基础真空泵还允许超快的泵降时间，使处理时间比传统的蚀刻和沉积工艺快90%。该反应堆还提供了一系列旨在提高准确性、安全性和易操作性的附加功能。其中包括液源再循环和测量机、集成滤波器和阀门单元，以及可编程逻辑控制器和数据采集工具，使用户能够实时监测所有反应堆参数和处理数据。总体而言,Centura Ultima Plus是一个高效、自动化的蚀刻和沉积反应堆,可提供卓越的工艺控制和可重复的吞吐量。该单元的设计考虑了安全性和成本,并提供了支持高级半导体制造过程所需的强大功能。
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