二手 AMAT / APPLIED MATERIALS Endura 5500 SIP EnCoRe #158915 待售
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ID: 158915
晶圆大小: 8"
优质的: 2007
System, 8"
Number of Chambers: 5
Process capabilities:
Hot Al, SIP TTN, SiP Encore Cu, SIP Encore Ta(N) and CleanW
Application: Copper Barrier Seed
Wafer size range: 6" to 8"
Wafer set size: 8"
Chamber 1:
Enhanced Hot Aluminum
Standard Body Chamber
Mech Clamped chuck, Ti clamp ring
CTI Onboard Cryo, fast regen, low vibe
Magnet type: 12.9" Al A,P/N: 0020-26822
Chamber 2:
Ti Nitride
Wide Body Chamber
Elec. Chuck: Bias MCS ESC, SST cover ring
Wafer bias power supply, 13.56MHz 600 W,
CTI Onboard Cryo, fast regen, low vibe
Magnet type: SIP REV2, P/N: 0010-04065
Chamber 3:
SIP Encore Cu
Wide Body Chamber
Elec. Chuck: SLT FDR E-Chuck, Ti cover ring, cryo chilled
Wafer bias power supply, 13.56MHz 1250 W,
CTI Onboard Cryo, fast regen, low vibe
Magnet type: LP 8.8, P/N: 0010-12864
Chamber 4:
SIP Encore Ta(N)
Wide Body Chamber
Elec.Chuck: SLT FDR E-Chuck, Ti -Arc-Sp
Wafer bias power supply, 13.56MHz 600W, ICE RF Match
CTI Onboard Cryo, fast regen, low vibe
Magnet Type: Encore Rev 2, P/N:0010-14875
Chamber 5:
CleanW PVD
Wide Body Chamber
Elec. Chuck: MCS+ ESC, SST-Arc-Sp cover ring
CTI Onboard Cryo, fast regen, low vibe
Magnet type: PVD WII, P/N: 0010-11925
Interface Type: SECS RS-232
Elevator Type: Universal Manual with Rotate
External Cooling: Water Cooled
Accessories:
(3) CTI 9600 Compressor, p/n: 3620-01389, water cooled
(3) CTI Onboard Terminal, p/n: 3620-01553
(2) Neslab System III Heat Exchanger
(1) CTL Inc subzero chiller, Model: BCU-L310F1-AMAT
(1) Toyota T100L Dry Pump
(2) Toyata T600 Dry Pump
Other Information:
Buffer Chamber Position "A": Pass thru with clear plastic lid
Position "B": Cooldown with temp monitor
Position "D": Reactive Preclean, Leybold TMP
Position "E" Orienter degas with temp feedback
Position "F" Orienter degas with temp feedback
Wide Body Loadlocks with variable speed soft vent
VHP Transfer Robot with HTHU compatible blade
HP+ Buffer Robot with with original metal blade
50' Cable harness
SMIF Integrated Tool Control
#NB: Asyst SMIF Loader sold as option.
Power Requirements: 480 V, 500.0 A, 60 Hz, 3 Phase
CE Marked: yes
2007 vintage.
AMAT/APPLIED MATERIALS ENDURA 5500 SIP EnCoRe是一种最先进的反应器,旨在在各种模块过程中提供优异的性能和简化的操作-从高效的Si外延生长、选择性外延生长（SEG）到氧化和氮化硅沉积。5500 SIP EnCoRe利用AMAT下一代热控制（NTCT）技术,通过全面控制整个热范围来平息过程的可变性。这是通过NTCT先进的温度控制算法实现的，使反应堆能够在秒内从4°C到1200°C精确调节工艺室。5500 SIP EnCoRe由其专有的感应耦合等离子体（ICP）源提供动力,旨在最大程度地提高过程的灵活性和控制能力。ICP系统可用于创建高度均匀的等离子体薄片,在不同的基板尺寸上保持过程稳定性。这些功能允许用户根据应用需求调整功率、总压力和订阅偏差，保证了适应性和可靠性。反应堆还具有载荷锁定设计，允许在转移室、载荷室和加工室之间形成刚性密封。这减少了潜在的污染，粒子生成的风险，简化了不同过程之间的过渡。此外，5500 SIP EnCoRe通过获得专利的缓蚀机制延长了工具寿命，通过旋转和可调节的速度保持反应堆腔室清洁。对于过程监控,5500 SIP EnCoRe具有多种内置传感功能。设计包括多个传感器和一个检测系统，允许辐射温度读数、底压监测、沉积层厚度测量和低气体使用量通知。所有这些设置都是自动化和跟踪的,确保了针对用户各自应用程序的定制方法。AMAT Endura 5500 SIP EnCoRe是优化工艺灵活性和质量控制的理想反应离子蚀刻工具。该系统具有卓越的温度精度、低污染和集成检测功能,包含一系列高级功能,旨在增强过程控制并降低成本。
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