二手 AMAT / APPLIED MATERIALS Endura 5500 #166248 待售

Sputtering system, 8" Process: AlCu / TiN / Ti Specifications: Robot: Buffer: AMAT HP, ceramic blade Transfer: AMAT HP, metal blade System monitor: 1: stand alone 2: through the wall 3: stand alone (1) each monitor rack Load lock: Narrow body with tits in and out No sliding sensor kit Chamber A - Chamber type: Pass through - Chamber Lid: Metal Lid - Cooling method: NA Chamber B - Chamber type: Cool down - Chamber Lid: Metal lid - Cooling method: By PCW Chamber C - Chamber type: N/A - Chamber process: - RF Gen/DC power supply - Turbo pump: - Process gas Chamber D - Chamber type: Preclean I - Chamber process: - RF Gen/DC power supply1: - RF Gen/DC power supply2: - Turbo pump Chamber F: - Chamber type: Orient/Degas Chamber 1 - Chamber type: Standard body - Chamber process: AlCu, Preheat - Process kit type/items/material: UNKNOWN - RF Gen/DC power supply1: AE, MDX-10K SLAVE - RF Gen/DC power supply2: A, MDX-20K MASTER - Chamber pump: CTI CRYO 8F 2phase - Source (Lid) type: P/N 0010-20059 - Pedestal type: A101 HEATER, Lifter : P/N 0010-20300 - Process gas: Ar, N2 Chamber 2 - Chamber type: Wide Body - Chamber process: TiN - Process kit type/items/material: UNKNOWN - RF Gen/DC power supply1: AE, MDX-10K MASTER - RF Gen/DC power supply2: N/A - Chamber pump: : CTI CRYO 8F 2phase - Source(Lid) type : P/N 0010-20059 - Pedestal type: A101 HEATER, Lifter : P/N 0010-20300 - Process gas: Ar, N2 Chamber 3 - Chamber type: Wide Body - Chamber process: Ti - Process kit type/items/material: UNKNOWN - RF Gen/DC power supply1: AE, MDX-10K MASTER - RF Gen/DC power supply2: N/A - Chamber pump: CTI CRYO 8F 2phase - Source (Lid) type: P/N 0010-70059 - Pedestal type: A101 HEATER, Lifter : P/N 0010-20300 - Process gas: Ar, N2 Chamber 4 - Chamber type: Wide body - Chamber process: Ti, Preheat - Process kit type/items/material: UNKNOWN - RF Gen/DC power supply1: AE MDX-10K MASTER - RF Gen/DC power supply2: N/A - Chamber pump: CTI CRYO 8F 2phase - Source (Lid) type: P/N 0010-20059 - Pedestal type: A101 HEATER, Lifter : P/N 0010-20300 - Process gas: Ar, N2 Includes: - Heat exchanger type: Neslab III 1ea - Compressor type: CTI 8500 2ea - EMO on source cover : No - Shutter : No - SBC : V440 - KSI Shild Treatment DC Power Supply 1ea - AE, MDX-052, SHILD TREATMENT CONTROLLER - COMDEL, CPS-1001 RF POWER SOURCE 60.00Hz - 15V P.S. ASSEMBLY / 24V P.S. ASSEMBLY Installed 1994 vintage.