二手 AMAT / APPLIED MATERIALS Endura 5500 #9004064 待售

HP PVD system, 8" Wafer type: notch Buffer robot type: HP Transfer robot type: HP Buffer robot blade: metal Wafer sensors: cassette Loadlock type: Narrow body with tilt Fab installation: TTW Transfer robot blade: metal Software revision E8.86 Signal tower: Red-amber-green System umbilicals: 50 ft standard EMO's: momentary Loadlock slit valve O rings: Viton (black) No heat exchangers Hard drive: 5 Gb Chamber 2: PVD wide body Process 2: PVD sputter Susceptor / pedestal: 101 Process kit type: other Manometer config: Single Lid type: 11.3 Wall cooling: None Manometer 1: 100mTorr Throttle valve: none Heater / cathode cooling: other Pump configuration: Cryo Manometer 2: None RF gen / DC supply: AE MDX-L6 Endpoint system: No Turbo pump: No Slit valve oring: Viton black Heated valve stack: No Chamber orings: Viton brown RF match: None Chamber lid clamps: yes Magnet number: 0010-20328 Chamber gases: Gas 1 50sccm Nitrogen, STEC 4400 MC mtl seal, MFC18, Standard gas stick configuration Gas 2 140sccm Argon, STEC 4400 MC mtl seal, MFC19, Standard gas stick configuration Gas valves: Nupro Chamber 3: PVD wide body Process 3: PVD sputter Susceptor / pedestal: 101 Process kit type: other Manometer config: Single Lid type: 11.3 Wall cooling: other Manometer 1: 100mTorr Throttle valve: none Heater / cathode cooling: other Pump configuration: Cryo Manometer 2: None RF gen / DC supply: AE MDX-L6 Endpoint system: No Turbo pump: No Slit valve oring: Viton black Heated valve stack: No Chamber orings: Viton brown RF match: None Chamber lid clamps: yes Magnet number: 0010-20328 Chamber gases: Gas 1 140sccm Argon, STEC 4400 MC mtl seal, MFC2, Standard gas stick configuration Gas 2 100sccm Nitrogen, STEC 4400 MC mtl seal, MFC3, Standard gas stick configuration Gas valves: Nupro Chamber 4: PVD wide body Process 4: PVD sputter Susceptor / pedestal: 101 Process kit type: other Manometer config: Single Lid type: 11.3 Wall cooling: other Manometer 1: 100mTorr Throttle valve: none Heater / cathode cooling: other Pump configuration: Cryo Manometer 2: None RF gen / DC supply: AE MDX-L6 Endpoint system: No Turbo pump: No Slit valve oring: Viton black Heated valve stack: No Chamber orings: Viton brown RF match: other Chamber lid clamps: yes Magnet number: 0010-01198 Chamber gases: Gas 1 140sccm Argon, STEC 4400 MC mtl seal, MFC5, Standard gas stick configuration Gas 2 50sccm Nitrogen, STEC 4400 MC mtl seal, MFC6, Standard gas stick configuration Gas valves: Nupro Chamber A: Pass through Gas valves: Nupro Slit valve oring: Viton black Chamber orings: Viton black Chamber B: Cooldown Gas valves: Nupro Slit valve oring: Viton brown Manometer: None Heater / cathode cooling: PCW Chamber pump: Edwards Chamber orings: Viton black No turbo pump Chamber E: Orienter / Degas Chamber F: Orienter / Degas AC Rack damaged during transport 1995 vintage.