二手 AMAT / APPLIED MATERIALS Endura 5500 #9177283 待售

System, 8" Wafer shape: SNNF Chamber 1: SIP Cu Process 1: Low temperature Cu Chamber 2: Wide body Process 2: TTN Chamber 3: Wide body Process 3: TTN Chamber 4: SIP Cu Process 4: Low temperature Cu Chamber A: Pass through Chamber B: Cooldown Chamber E: Orient / Degas Chamber F: Orient / Degas Transfer robot type: HEWLETT-PACKARD Transfer robot blade: Metal Buffer robot type: HEWLETT-PACKARD Buffer robot blade: Metal Loadlock type: Narrow BD with tilt out Signal tower: 4 Color R/G/Y/B MF Facilities: Bottom System umbilical: 25 ft EMIs: Turn to release No facility power (UPS) No loadlock pump Loadlock slit valve O-Ring: Viton (Black) Heat exchanger 1: NESLAB Heat exchanger 2: M-Pack Hard drive: SCSI (2) CRTs No GEM No OTF Main AC box: 480 V type, wide type Chamber A: Chamber type: Pass through Gas valves: Fujakin Slit valve o-ring: Viton (Black) Clear chamber lid Chamber B: Chamber type: Cooldown Gas valves: Fujakin Slit valve o-ring: Viton (Black) Heater / Cathode cooling: PCW Clear chamber lid Chamber 1: Chamber type: SIP Cu Manometer config: Single Manometer 1: 100 mTorr Slit valve o-ring: Viton (Black) Shutter option Chamber process: Low temperature Cu Lid type: SIP Source RF Gen / DC Supply 1: ADVANCED ENERGY MDX-L6 Susceptor / Pedestal: Low temperature ESC Wall cooling: PCW Heater / Cathode cooling: M-Pack Gate valve position: 3-Pos Process kit type: SIP Chamber pump: Enhanced 3 phase cryo Magnet number: 0010-21676 Gas 1: MFC Size: N2 100 Sccm Gas name: AR MFC Type: STEC 7440 MFC Number: MFC16 Gas stick configuration: Single Chamber 2: Chamber type: Wide body Manometer config: Single Manometer 1: 100 mTorr Slit valve O-Ring: Viton (black) Shutter option Chamber process: TTN Lit type: G12 RF Gen / DC Supply 1: ADVANCED ENERGY MDX-650 HiZ Susceptor / Pedestal: A101 Heater / Cathode cooling: PCW Gate valve position: 3-Pos Process kit type: A101 Chamber pump: Enhanced 3 phase cryo Magnet number: 0010-21844 Chamber 3: Chamber type: Wide body Manometer config: Single Manometer 1: 100 mTorr Slit valve o-ring: Viton (black) Shutter option Chamber process: TTN Lit type: G12 RF Gen / DC Supply 1: ADVANCED ENERGY MDX-650 HiZ Susceptor / Pedestal: A101 Heater / Cathode cooling: PCW Gate valve position: 3-Pos Process kit type: A101 Chamber pump: Enhanced 3 phase cryo Magnet number: 0010-21844 Chamber 4: Chamber type: SIP Cu Manometer config: Single Manometer 1: 100 mTorr Slit valve o-ring: Viton (black) Shutter option Chamber process: Low temperature Cu Lit type: G12 RF Gen / DC Supply 1: ADVANCED ENERGY MDX-L6 Susceptor / Pedestal: Low temperature ESC Heater / Cathode cooling: NESLAB III Process kit type: SIP Chamber pump: Enhanced 3 phase cryo Magnet number: 0010-21676 Power supply: 208 VAC, 3 Phase, 5 wire, 400 A.