二手 AMAT / APPLIED MATERIALS Endura 5500 #9241774 待售

MOCVD System, 8" Wafer shape: SNNF MF Facilities: Bottom Load lock type: Narrow BD without tilt out CTI-CRYOGENICS Buffer chamber CTI-CRYOGENICS Transfer chamber No SMIF interface Mainframe: Buffer robot type: HP+ Wafer sensor: Mini beam Buffer robot blade: Metal Transfer robot type: HP+ Transfer robot blade: Metal Hard Disk Drive (HDD): SCSI (2) CRT Monitors Chamber 1: Type: IMP Vectra Process 1: Ti Susceptor / Pedestal: B101 Process kit type: IMP Single manometer configuration Lid type: G12 Chamber pump: 3P Onboard 8F Manometer 1: 100 mTorr Heater / Cathode cooling: NESLAB II CTI-CRYOGENICS Cryo pump LEYBOLD Turbotronik NT 150/360 Turbo controller (2) RF Generators / DC Supplies ADVANCED ENERGY MDX-L12M ADVANCED ENERGY HFV-8000 ADVANCED ENERGY CX-600S RF Match: 13.56 MHz, 2 MHz Shutter option Gate valve position: 3-Position 2 MHz Matching box capacitor: 0.01uF Chamber 2: Chamber type: TxZ HP+ Process 2: CVD TiN Susceptor / Pedestal: HP+ Dual manometer Wall cooling: AMAT1 Chamber pump: AA70W Manometer 1: 10 Torr Manometer 2: 100 Torr No endpoint system Throttle valve Heater / Cathode cooling: PCW ADVANCED ENERGY PDX 900-2V RF Generator / DC Supply LEYBOLD 361C Turbo pump LEYBOLD Turbotronik NT 150/360 Turbo controller EBARA AA70W Pump Gate valve position: 2-Positions Chamber 3: Chamber type: TxZ HP+ Chamber process: CVD TiN Pump configuration: 361C Susceptor / Pedestal: HP+ Dual manometer Wall cooling: AMAT1 Chamber pump: AA70W Manometer 1: 10 Torr Manometer 2: 100 Torr Throttle valve Heater / Cathode cooling: PCW ADVANCED ENERGY PDX 900-2V RF Generator / DC Supply LEYBOLD 361C Turbo pump EBARA AA70W Pump Gate valve position: 2-Positions No endpoint system Chamber A: Chamber type: Pass through Chamber lid: Clear lid Chamber B: Chamber type: Cool down Heater / Cathode cooling: PCW Chamber lid: Clear lid Chamber D: Chamber type: PCII Chamber process: Oxide etch Single manometer Lid type: Resonator EDWARDS iL600N Chamber pump Manometer 1: 100 m Torr COMDEL CPS 1001S RF Generator / DC Supply LEYBOLD Turbovac 361C Turbo pump LEYBOLD Turbotronik NT 150/360 Turbo controller EBARA iL70 Pump RFPP LF10A RF Generator / DC Supply RF Match: 13.56 MHz COMDEL CPS-1001S RFPP LF-10A Module: AMAT / APPLIED MATERIALS System controller (2) AMAT / APPLIED MATERIALS Generator racks AMAT / APPLIED MATERIALS Main AC box NESLAB AMAT / APPLIED MATERIALS Heat exchanger CTI-CRYOGENICS 9600 Compressor CTI-CRYOGENICS 3P Motor controller EDWARDS iL600N Pump Controllers: Slot / Top rack board 1 / SBC Board 2 / Videl board 3 / OMS Board 4 / Digital input / Output board 1 5 / Digital input / Output board 2 6 / Digital input / Output board 3 7 / Digital input / Output board 4 8 / Digital input / Output board 5 9 / Digital input / Output board 6 10 / SEI Board 13 / Digital input / Output board 7 (Option) 14 / AO Board 1 (Option) 15 / Stepper board 1 18 / Stepper board 2 19 / AI Board 20 / AO Board 2 21 / AO Board 3 22 / Hard Disk Drive (HDD) 23 / Grounding JAC 24 / Convectron board 25 / Convectron board 26 / Convectron board 27 / Convectron board 28 / TC 29 / TC 30 / ION Gauge board 1 31 / ION Gauge board 2 32 / Spare 33 / Digital input / Output board 8 34 / Digital input / Output board 9 35 / Digital input / Output board 10 37 / Digital input / Output board 12 39 / Digital input / Output board 14 40 / Floppy disk 42 / Cryo temp 43 / AI Mux 44 / AI Mux 45 / AI Mux 47 / Opto detect board 1 48 / Opto detect board 2 49 / Opto detect board 3 Power supply: 200 VAC, 60 Hz, 3 Phase, 343 A, 150 kVA 2000 vintage.