二手 AMAT / APPLIED MATERIALS Endura 5500 #9257279 待售
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ID: 9257279
优质的: 1993
PVD System
Chambers:
(4) PVD chambers (2 TiN and 2 Al)
(2) Degas chambers
(1) Preclean chamber
CTI-CRYOGENICS / HELIX TECHNOLOGY 0120-60-4887
CTI-CRYOGENICS Roughing Valve 8112579G001
CTI-CRYOGENICS On-Board 8F Cryopump 8116142G001
CTI-CRYOGENICS Roughing Valve 8112579G001
CTI-CRYOGENICS On-Board 8F Cryopump 8116027G001
CTI-CRYOGENICS / HELIX TECHNOLOGY 0120-60-4887
CTI-CRYOGENICS SPLTR Box Tool 8135240G001
MKS Type 627 Pressure Transducer
MKS Type 627 Pressure Transducer
MKS Type 627 Pressure Transducer
CTI-CRYOGENICS Roughing Valve 8112579G001
CTI-CRYOGENICS SPLTR Box Tool 8135240G001
CTI-CRYOGENICS On-Board FastRegen Sputtering Control
CTI-CRYOGENICS On-Board 8F Cryopump 8116027G001
CTI-CRYOGENICS Roughing Valve 8112579G001
CTI-CRYOGENICS Valve 8112095
CTI-CRYOGENICS On-Board 8F Cryopump 8116027G001
CTI-CRYOGENICS On-Board FastRegen Sputtering Control
MKS Type 627 Pressure transducer
Endura Wafer lift assembly 101 Rev. 003 0010-70271
8" Preclean II RF Match 0010-20524 (Label PN 0060-21140)
Endura Wafer lift assembly preclean 2 Rev. 003, 21902-08
MKS Type 627 Pressure transducer
0010-20277
8" Degas Lamp 350C 0010-20317
8" Degas Lamp 350C 0010-20317
CTI-CRYOGENICS On-Board Module 8113100G001
CTI-CRYOGENICS Roughing Valve 8112579G001
Gas Box #1 0010-20217 Rev. B
CTI-CRYOGENICS / HELIX TECHNOLOGY 0120-60-4887
CTI-CRYOGENICS On-Board 8F Cryopump 8116142G001
Loadlock A (11)
Loadlock B (0620-01049)
Operator Control Panel BD Assy. 0100-20032 Rev. D
ViewSonic E55 Monitor VCDTS21914-2M
Standalone VGA Monitor Base 0010-70386 Rev. A
Gas Box #2 0010-20218 Rev. B
Gen Rack #1
ADVANCED ENERGY MDX-L12M
ADVANCED ENERGY MDX-L12-650
ADVANCED ENERGY MDX-L12M-650
Gen Rack #2
ADVANCED ENERGY MDX-L12M
ADVANCED ENERGY MDX-L12M
Gen Rack #3
ADVANCED ENERGY LF10A
COMDEL RF Power Source CPS-1001S
GRANVILLE-PHILLIPS Ionization gauge supply 332102
15V PS Assembly
24V PS Assembly
CTI-CRYOGENICS On-Board 3PH MTR Control 8124063G001
CPRSR High Perf Model 9600 3620-01389 Rev. A
CTI-CRYOGENICS On-Board 3PH MTR Control 8124063G001
Thornton 200CR
CTI-CRYOGENICS 9600 Compressor 8135917G001
CTI-CRYOGENICS 9600 Compressor 8135909G001
NESLAB BOM # 327099991701
EBARA A30W
EBARA A70W
HARMONIC GEAR UGH50-28
VEXTA 5-Phase Stepping Motor A4249-9215HG
VEXTA 5-Phase Stepping Motor A4249-9215HG-A1
GEORG FISCHER V 82
Supply voltage: 480 VAC, 3 Phase, 50/60 Hz
Max system rating: 150 kW
Largest load ampere rating: 42 A
Interrupt current: 10,000 Amps IC
1993 vintage.
AMAT/APPLICED MATERIALS/AKT Endura 5500是设计用于半导体工业的高端自动化反应堆设备。该系统作为一个通用的生产平台，能够处理广泛的过程任务。这包括沉积、蚀刻、氧化、氢化和化学气相沉积（CVD）。AKT Endura 5500的主机架由一个集成的清洁室、气体模块和温控样品室组成。清洁室用于在其他过程开始之前使腔壁失活。气体模块提供氦气、氮气、氙气和氧气的均匀供应。样品载体的温度可调节至30°C至400°C的精确温度。总的来说，AMAT ENDURA 5500是一个先进的单元，从一台机器结合了精度、重复性和可靠性。它的全过程自动化（TPA）使操作员能够使用单个解决方桉监控、控制和记录复杂的流程。这是通过其用户友好的图形用户界面（GUI）和专有的PID控制工具完成的。资产的流程控制器提供了许多流程控制功能,例如实时流程监控、配方管理和集成数据日志记录。此外，该模型还配备了流程自动化功能，允许公式优化和开发新流程。ENDURA 5500具有很高的可重复性,这是产生高质量结果所必需的。腔壁的抗污染能力更强，因此从一个阶段到下一个阶段都能达到相同的效果。恩杜拉5500是为半导体生产而优化的可靠的高端反应堆设备。它的自动化过程、过程控制功能和数据记录系统使其成为满足关键工业需求的理想选择。APPLICED MATERIALS ENDURA 5500结合了重复性、可靠性和工艺优化，是该领域的一颗真正的宝石。
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