二手 AMAT / APPLIED MATERIALS Endura II #293746384 待售

PVD System FI M/F CH-1/ CH-2 / CH-3 / CH-E&F (2) EQ Rack AC Rack 2nd Rack DI cooler (2) Cryo comp Cryo comp rack (4) Dry pump Trance CB Box FI Front panel FI Corner panel (2) FI Corner panel Load port bar (3) Power cable Power cable / DI Return hose He hose, DI Return hose DI Return hose AC Power cable / Signal cable AC Power cable (2) DC Cable DC, RF Turbo cable DI Hose, 2" FI Monitor / Degas gas line (5) Process kit Step OHT WIP Delivery type Single Axis Aligner Pre alignment and centering YASKAWA track atmospheric robots Controller / track atmospheric robots (3) Load ports (4) Color configurable light towers Carrier ID Host interface Mainframe: Type: Endura2 gray Chamber 1-6 : PVD Chamber A: Path / Cool Chamber B: Cool Chamber C: PC Chamber E and F: SINGLE DEGAS Viton chamber Slit Valve Local center finder XP Robot blade Chamber1: 0190-22985 Heater 0040-62877,0040-76943 Adaptor SUMITOMO Cryo pump Manometer: 0.1 Torr Gasses: AR 200SCCM, AR 20SCCM, AR 50SCCM Gauge: Pirani, ION Chamber2: 0190-22985 Heater 0040-62877,0040-76943 Adaptor SUMITOMO Cryo pump Manometer: 0.1 Torr Gasses: AR 200SCCM, AR 20SCCM, AR 50SCCM Gauge: 3310-00288 Pirani 0190-48891 ION Shutter: yes Chamber3: 0190-27432 Heater 0040-80367 Adaptor SUMITOMO Cryo pump Manometer: 0.1 Torr Gasses: AR 100SCCM, AR 20SCCM Shutter: yes Chamber4: 0190-27430 Heater 0040-81104 Adaptor SUMITOMO Cryo pump Manometer: 0.1 Torr Gasses: AR 200SCCM, AR 20SCCM Gauge: ION Chamber5: 0190-23068 Heater 0040-81104 Adaptor SUMITOMO Cryo pump Manometer: 0.1 Torr Gasses: AR 200SCCM, AR 20SCCM Gauge: ION Chamber6: 0010-22985 Heater 0040-82988 Adaptor SUMITOMO Cryo pump Manometer: 0.1 Torr Gasses: AR 100SCCM, AR 20SCCM Gauge: ION Shutter: yes Chamber A: DI Cool type Modified chuck shape Chamber B: DI Cool type Modified chuck shape Chamber c: CDX2000 DC PWR SPLY Master 0040-86515 Adaptor Gasses: AR 20SCCM, AR 200SCCM Electrical Requirement: Line frequency: 50Hz/60Hz Generator rack 1 Line voltage: 200/208V/480V Generator rack 2/3 Heat Exchanger / Chiller: Daikin DI Chiller Robots: Buffer and transfer: XP ROBOT DRY Pumps: CH: C Load lock System Cryo compressor 1st to 2nd: CSW-610 (420/480V) 2007 vintage.