二手 AMAT / APPLIED MATERIALS Endura II #9315363 待售

PVD System, 12" Wafer type: Notch 3E Impulse AIN System Chamber location / Option Level 1 / Endura II Level 2 / Emerging Position 1 / Impulse ALN Position 4 / Impulse ALN Position A / Cool down Position B / Cool down Mainframe Motion controller Particle management package Chamber cool down gas lines Single wafer load locks: HT SWLL without DEGAS module XP Robot with enhanced high temperature wrists Metal robot blade Rack CTI-CRYOGENICS Cryo Pump (2) Cryo compressors Cryo compressor voltage: 400 V - 480 V Cryo helium lines: 75 ft Heat exchanger hose: 75 ft MFC Type: GF 125 Factory interface: Front end module Platform application: CPI Gen 4 with KVM server and user interface UPS HT SWLL With STD / Opera OHT WIP Delivery (2) SELOP 7 Load ports Info pad position: A / B Colored lights (8) Lights load port operator interface E99 Carrier reader: TIRIS With RF Upper E84 Data logging sensors and cables Operator access switch Top air intake systems (4) Colors light tower Rack System monitors: Flat panel monitor, 19" Keyboard Cables: 15 ft with 6 ft effective Remote flat panel monitor, 19" Cables: 75 ft with 65 ft effective Impulse: Position (1, 4) Biasable wafer pedestal HV E-Chuck Shutter Baratron gauge size: 100 mTorr RGA Valve manual Turbo cryo pump with water trap DEGAS RGA Valve manual (4) EBARA AA70W Pumps (2) ADIXEN A100L Pumps Rough pump voltage: 208 V Umbilical: AC Rack to mainframe: 75 ft AC Rack to HX: 75 ft AC Rack to rough pump: 75 ft Mainframe to equipment rack: 75 ft Power supply: 10 kW, DC.