二手 AMAT / APPLIED MATERIALS Lot of PVD systems #9299990 待售

Qty / Model (2) / Centura Multi chamber type sputter system, 8" L/L Narrow HP Chamber A: GANMA2 / TTN (ESC) Chamber B: GANMA2 / TTN (ESC) Chamber C: PC2 Chamber D: Cool down Chamber E: Blank Chamber F: O/D 1996 vintage PVD System, 6"-8" Frame: Centura 5200 (2) Process chambers (2) CTI-CRYOGENICS 9600 Compressors Generator rack AC Controller Cassette stage type: Automated Load lock chamber Body type: Narrow Buffer chamber HP Robot Automated indexer Blade: Metal SBC Board V452 Chamber A: GAMMA 2 TiN (ESC) Chamber B: GAMMA 2 TiN (ESC) Chamber C: PC-II Chamber D: Cool down Chamber F: Orientor degas Chamber A: Wide body Magnet: 0010-21788 Heater: E-Chuck Target: Ti Shutter DC P/S (Master): MDX-L12M-650 DC P/S (Slave): MDX-L12-650 Chamber B: Wide body Magnet: 0010-21788 Target: Ti DC P/S (Master): MDX-L12M 0190-76192 DC P/S (Slave): MDX-L12-650 0190-21111 Missing parts: Electrostatic chuck CH-A, CH-B Ion gauge sealing cap Spark power supply Heater drive motor Matcher Power supplies Lid for cooling SBC Heater driver Ion gauge driver Power supply: 3 kV and controller Floppy disk drive D-I / O Board A-I / O Board ISO / AMP Board Robot indexer cable CRT SCE, PVD Driver 2-Phase driver (2) Generator rack remotes 15V System PS 24 V Unite Generator racks NESLAB Roughing piping Power cable 1996 vintage (2) / Endura / PVD Systems, 8" L/L Narrow HP Chamber A: Pass through Chamber B: Cool down Chamber C/D: PC2 Chamber F: O/D Chamber 1: AL (ESC) STD Chamber 2: TTN 101Ti / TiN WB Chamber 3: TTN 101Ti/TiN WB Chamber 4: Ti (ESC) WB 2001 vintage.