二手 AMAT / APPLIED MATERIALS P5000 MxP #9017018 待售
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ID: 9017018
Cluster tool, 8"
(2) Chambers
(8) Storage units
General Information:
Cass nest: Plastic 8"
Wafer shape: SNNF (Semi notch no flat)
No SMIF Interface
System Information:
Software version: B4.70
Has SECS / GEM
Chamber Location / Type / Current Process:
Position A: MxP / Oxide etch
Position B: MxP / Oxide etch
Etch chamber:
Chamber type: MxP
Wafer clamp: Polyimide ESC
Has BS He Cooling
Has He dump line
Turbo pump: SEIKO STP-301CVB
Endpoint type: Stand alone
Monochrometer qty: Each per chamber
Generator model: ENI OEM-12B3
Max Power: 1250 w
Lid temp control: PID control
Gate valve: Heated gate valve
Matcher: SMA-1000
Process Manometer: MKS 1 Torr
Gas Panel:
Manual valve: On each line
Filter: On each line
Gas panel facilities hook up: Multi-line top feed
Exhaust: Top
Has gas panel door interlock
Has gas panel exhaust interlock
Gas Panel Pallet:
(5) Insert gas lines per chamber
MFC Type: STEC SEC-44000 MC / STEC SEC-Z512MGX
Chamber A:
Line 1: O2 / 212 / SEC-4400
Line 2: Ar / 150 / SEC-Z512MGX
Line 3: N2 / 100 / SEC-4400
Line 4: CF4 / 100 / SEC-4400
Line 5: CHF3 / 100 / SEC-Z512MGX
Chamber B:
Line 1: O2 / 212 / SEC-4400
Line 2: Ar / 150 / SEC-Z512MGX
Line 3: N2 / 100 / SEC-7440M
Line 4: CF4 / 100 / SEC-4400
Line 5: CHF3 / 100 / SEC-Z512MGX
Mainframe:
Loadlock type: 8-slot
Has cassette present sensor
Robot type: DRIVE, ROBOT P 5000 WKIT
EMO Button: Front, side
Has water leak detector
Signal tower (front): Green, yellow, red
Remotes:
Line frequency and voltage: 50 / 60 Hz, 3 Ph, 208 VAC
Remote UPS interface: 1 Ph, 120 V
System monitor display / conntroller: In front
Has EMO button
Has smoke detector
Has water leak detector
Heat Exchanger type:
For wall: AMAT-0 x1
For cathode: NESLABE HX-150 x1
Pumps Type:
LL Chamber: EBARA A10S (not included in scope)
Chamber A: EBARA A30W (not included in scope)
Chamber B: EBARA A30W (not included in scope)
1992 vintage.
AMAT/APPLIED MATERIALS P5000 MxP是一种反应器,设计用于开始完成半导体器件的制造.该工具是一种高度通用的外延沉积工具,允许薄膜在高基质温度下沉积。该工具能够使用具有专有多区域技术的多个源进行沉积,从而提高均匀性,从而提高晶圆产量。先进的光源技术减少了功率和温度的波动,确保了更好的胶片质量和可重复性。该工具具有卓越的灵活性,允许用户沉积各种材料,包括氧化物、氮化物、金属及其组合。此外,该工具允许一系列薄膜厚度,从亚单层到几百纳米。能够操纵温度、压力流量和功率等参数,使用户能够量身定制沉积过程。AMAT P5000 MxP配备了专有的超高真空设备,可减少系统中的颗粒和污染物并提高生产率。先进的视线沉积工艺通过创建一个完全密封的腔室并对其中的激光器作出反应,提供了比传统沉积系统更好的质量。这有助于提高控制、稳定性和可重复性。该工具还具有先进的流程控制软件,允许用户优化流程以提高速度和效率。APPLIED MATERIALS P5000 MxP还具有强大的单元监控和诊断功能,有助于提高可靠性和预测性能。利用先进的监测功能,该工具可以检测沉积参数、大气压或任何其他异常条件可能产生的问题,使操作员能够迅速解决这些问题。总体而言,P5000 MxP是一种可靠、高性能的沉积工具,可让用户满足半导体器件制造的严格要求。此工具提供了卓越的灵活性、改进的质量和可靠性、提高的产量以及先进的过程控制。AMAT/APPLIED MATERIALS P5000 MxP凭借其先进的多区技术和超高真空机,是半导体器件制造的理想选择。
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