二手 AMAT / APPLIED MATERIALS P5000 MxP #9037741 待售
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ID: 9037741
Cluster tools with 2-chamber, 8"
General Information:
Cass nest: Plastic 8"
Wafer shape: SNNF (Semi notch no flat)
No SMIF Interface
System Information:
Software version: B4.70
Has SECS / GEM
Chamber Location / Type / Current Process:
Position A: MarkII / Oxide etch
Position B: MarkII / Oxide etch
Etch chamber:
Chamber type: MxP
Wafer clamp: Polyimide ESC
Has BS He Cooling
Has He dump line
Turbo pump: SEIKO STP-301CVB
Endpoint type: Stand alone
Monochrometer qty: Each per chamber
Generator model: CH-A:ENI OEM-12A CH-B:ENI OEM-12B-02
Max Power: 1250 w
Lid temp control: PID control
Gate valve: Heated gate valve
Matcher: SMA-1000
Process Manometer: MKS 1 Torr
Gas Panel:
Manual valve: On each line
Filter: On each line
Gas panel facilities hook up: Multi-line top feed
Exhaust: Top
Has gas panel door interlock
Has gas panel exhaust interlock
Has gas panel remote mini-controller
Gas Panel Pallet:
MFC type: 8-lines per chamber
Gas line (gas name, MFC size): STEC SEC-4400MC / STEC SEC-Z512MGX
Chamber A:
Line 1: CHF3/100/SEC-4400
Line 2: O2/40/SEC-4400
Line 3: CH2F2/30/SEC-4400
Line 4: CF4/100/SEC-4400
Line 5: NF3/100/SEC-Z512MGX
Line 6: HBr/200/SEC-4400
Line 7 (remote): CI2/50/40/SEC-4400
Line 8 (remote): Ar/100/40/SEC-4400
Chamber B:
Line 1: CHF3/100/SEC-4400
Line 2: O2/40/SEC-4400
Line 3: CH2F2/30/SEC-4400
Line 4: CF4/100/SEC-4400
Line 5: NF3/100/SEC-Z512MGX
Line 6: HBr/200/SEC-4400
Line 7 (remote): CI2/50/40/SEC-4400
Line 8 (remote): Ar/100/40/SEC-4400
Mainframe:
Loadlock type: 29-slot
Has cassette present sensor
Robot type: DRIVE, ROBOT P 5000 WKIT
EMO Button: Front, side
Has water leak button
Signal tower (front): Green, yellow, red
Remotes:
Line frequency and voltage: 50 / 60 Hz, 3 Ph, 208 VAC
Remote UPS interface: 1 Ph, 120 V
System monitor display / conntroller: In front
Has EMO button
Has smoke detector
Has water leak detector
Heat Exchanger type:
For wall: AMAT-0 x1
For cathode: NESLAB HX-150 x1
Pumps Type:
LL Chamber: EBARA A10S (not included in scope)
Chamber A: EBARA A30W (not included in scope)
Chamber B: EBARA A30W (not included in scope)
1993 vintage.
AMAT/APPLIED MATERIALS P5000 MxP Reactorm是一种成本效益高、体积大的工艺技术开发工具。该反应堆能够高效、低成本地生产各种先进材料，包括陶瓷和金属。反应堆的核心特征是其模块化设计，使其能够针对不同的应用和过程进行定制。AMAT P5000 MxP反应器旨在为用户提供最佳的温度、压力和成分控制水平,同时还允许材料的反应灵活性。反应堆能够处理高达500 °C的温度和高达5 bar的压力。它具有用于气体进出口的顶部和底部端口，并具有特殊的曝气系统，以改善空气流通。反应堆还设有可调加热区，便于精确控制温度和反应参数。APPLICED MATERIALS P5000 MxP反应堆的模块化设计允许轻松添加硬件和软件,从而实现最佳的工艺路由。该反应堆可与各种传感器、泵和其他部件集成在一起，以便进行有效的批量生产。此外，反应堆还设计了若干控制和监测系统，包括计算机控制反应、自动数据收集和分析。为了使P5000 MxP反应堆的性能最大化，反应堆经常与电化学电池、气相沉积室和等离子体蚀刻单元等二次处理器耦合。反应堆还拥有大量的材料模板库，能够快速切换所需的最终产品。这在与化学气相沉积、溅射和反应性离子蚀刻等工艺技术结合使用时特别有利。总体而言，AMAT/APPLIED MATERIALS P5000 MxP反应堆是先进材料开发和制造的可靠和经济高效的工具。反应堆的模块化设计和多种多样的功能使用户能够调整和扩展其特定应用的系统,其特点包括精确的温度和成分控制,从而实现更好的过程控制、改进的产品质量和更大的多功能性。
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