二手 AMAT / APPLIED MATERIALS Producer III #9223648 待售

Shrink system, 8" Process: SILCU CIM (3) Twin chambers Hardware configuration: SMIF: (4) ASSYST Indexers Handler system: SMIF Front end robot VHP Buffer robot (3) Process chambers Heat exchanger: Steelhead High RF generator: (4) RFG 2000-2V DPA RF Generator: ENI DPG-10 Platform type: Producer shrink Chamber A & B & C: Chamber body effective volume (Syscon): Chamber A: 12980 Chamber B: 13275 Chamber C: 13300 SiH4_H: 1 SLM SiH4-L: 300 Sccm NH3 HI: 1 SLM N2O HI: 3 SLM N2O LO: 500 Sccm N2: 10 SLM NH3: 500 Sccm Ar: 5 SLM He: 10 SLM Number of gas lines / Name: 10 RF1 & RF2 Generator (Max Power / Brand): 2000 W Foreline pump (EBARA AAS 100WN): 10000 L/Min Baratron off-set 626 MKS: 10 T Lift pin type: Free drop Lift pin speed (Timing of movement): 3580 Load lock: A & B Configuration: Pump capacity (EDWARDS BOC): IPX 100A Difuser: ENTEGRIS 60 PSIG Venting N2 flow rate: 10 SLM Venting time: 57 Sec Pump time: 65 Sec Baratron Range / Brand / Off-Set: 325 Moducell MKS Pressure set point for LL pumping switching: 45 Sec Time delay for LL door open: 10 Sec Transfer chamber: Type of robot / Robot blade: Super blade Robot speed with wafer / Runrate / Slope: 300000 / 210000 230000 / 120000 Robot speed without wafer (Ext/Rot): 200000 / 325000 230000 / 325000 MFC N2 Flow setting: 10 SLM Chamber base pressure ( Actual / Alarm): 208 mTorr Wafer transfer - chamber: 300 mTorr Buffer pressure transfer chamber - wafer: 320 mTorr Other periphere: SiH4 HI: 29.6, 30, 36 NH3 HI 27.6, 27.8, 29 CDA Pressure: 85 HX Temperature / Flow rate: 75 N2 (P): 27 SiH4 LO NH3 LO N2O: 30 NF3 2004 vintage.