二手 AMAT / APPLIED MATERIALS Producer III #9240095 待售

CVD System, 8" (3) Twin chambers Platform: Producer S Wafer shape: SNNF Load lock: Cassette type, 8" Fast vent option Mainframe: Buffer robot type: VHP FI Robot type: Manual Buffer robot blade Chamber A: Producer APF Chamber B: Producer DARC Chamber C: Producer SAUSG (2) Heater exchangers: Steelhead 0 Chiller MX-500 O3 Rack Front end type: Manual Front end robot: PRI BROOKS ABM407 Buffer robot: VHP Transfer pump: IPX Pump Chamber slit valve / LL Door: VAT L/L Gauge Hard disk Floppy disk: 1.44 M Chamber A: (APF) Chamber parts: Gas feedthrough assy Gas box Face plate Heater / TC: OEM Pressure gauge: MKS 20 Torr / MKS 100 Torr RF Power: RF Generator: ADVANCED ENERGY 2000-2 V Match type: ADVANCED ENERGY Fixed match Gas panel: C3H6, Ar, He, O2 Vacuum system: Throttle valve: MKS 253B-24627 ISO Valve: MKS Chamber B: (DARC) Chamber parts: Gas feedthrough assy Gas box Face plate Heater / TC: OEM Pressure gauge: MKS 100 Torr / MKS 10 Torr RF Power: RF Generator: ADVANCED ENERGY 2000 - 2 V Match type: ADVANCED ENERGY Fixed match RPS Type: MKS ASTEX Gas panel: CO2, N2O, He, NF3, SIH4 Vacuum system: Throttle valve: MKS 253B-24627 ISO Valve: MKS Chamber C: (SAUSG) Chamber parts: Gas feedthrough assy Gas box Face plate Heater / TC: OEM Pressure gauge: MKS 20 Torr / MKS 1000 Torr RF Power: No RF generator No match RPS Type: (MKS ASTEX) Gas panel: O2, NF3, Ar, He, O3, TEOS Vacuum system: Throttle valve ISO Valve Light tower: RYGB Power: 208 V, 50/60 Hz Full load current: 240 A CE Marked 2004 vintage.