二手 AMAT / APPLIED MATERIALS Producer SE #9017194 待售
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ID: 9017194
优质的: 2001
SACVD BPSG system, 8"
System overview:
Technology: DCVD
Wafer shape: SNNF
Position A: (XY) BPSG TWIN
Position B: (XY) BPSG TWIN
Position C: (XY) BPSG TWIN
System software: 3.4_8
NT version: P 133
Factory interface system 5.4 FI, options:
Number of load ports: 2
Metrology unit: Nanometrics
Light tower: 4-color configurable light tower
Remote options, system monitors:
First local monitor: standalone 15"
Second local monitor: TTW with keyboard, 15"
Remote options, heat exchanger:
System heat exchanger: Steelhead
AMAT HX hoses and manifolds: AMAT stainless hose upgrade: yes
Pumps:
Transfer chamber: BOC Edwards IPX-100L
Chamber A roughing pump: BOC Edwards iH-1000
Chamber B roughing pump: BOC Edwards iH-1000
Chamber C roughing pump: BOC Edwards iH-1000
System power mainframe: 208 V, 3 phase, 4 wire, 300 A
EMO interface: 24 VAC
Ch A-B-C, (XY) BPSG TWIN:
Robot blades: aluminum, (2) 0040-43516
Heater: HA-12 tight RF mesh with non RF cap, (2) 0190-03516
Foreline TV: 2.5" heated throttle valve, 0010-38429
Foreline ISO: valve, ISO 200 mm SACVD PROD-REP.16 holes, 0010-01653
RPS: Astron EX RPS, 0920-00057
Ch A, (XY) BPSG TWIN, gas box options:
Gas pallet type: BPSG only
Line 1: O3
Line 2: O2- 20SLM
Line 3: N2 Purge
Line 4: NF3- 3SLM
Line 5: Empty
Line 6: Ar- 5SLM
Line 7: He- 20SLM
Line 8: He- 20SLM
Line 9: He- 20SLM
Line 10: Liquid N2 purge
Line 11: Empty
Line 12: Empty
Line 13: Empty
Line 14: Liquid Pos 1, Teb- .5 g/min
Line 15: Liquid Pos 2, TEOS- 4.0 g/min
Line 16: Liquid Pos 3, Tepo- .25 g/min
Ch A-B-C, (XY) BPSG TWIN, process abatement: TCS
Ch A-B-C, (XY) BPSG TWIN, process kit:
Gas box: gas box - bypass, (2) 0040-53927
Blocker UHD: blocker, 200 mm producer, (2) 0021-09914
Faceplate BPSG: faceplate, 200 mm producer, (2) 0021-03568
Top pumping liner: pumping liner top producer, (2) 0020-00402
Liner, ceramic middle: liner, ceramic middle, producer, (2) 0020-00316
Liner, ceramic bottom: liner, ceramic bottom, producer, (2) 0020-00317
Liner, ring insert: liner, ring insert, producer, (2) 0021-06569
Lift pin-TC: lift pin 170 fixed floating 200 mm producer, (8) 0200-03314
Lift ring: lift ring 120 fixed floating 200 mm producer, (2) 0200-02576
Hoop: hoop 140 fixed floating 200 mm producer, (2) 0200-02577
2001 vintage.
AMAT/APPLIED MATERIALS Producer SE是一种高度先进的反应堆，设计用于生产先进材料和新型装置。该反应堆的设计满足了最严格的要求，为生产先进材料和新型装置提供了尽可能高的产量。AMAT Producer SE汇集了可定制的半导体技术、材料科学和加工专业知识的独特组合,为先进材料和设备提供了最高的产量。它专为实现最高级别的自动化和可扩展性而设计,以确保过程的保真度,无论客户的数量或复杂性如何。这种反应堆的灵活结构允许精确控制反应物的流动，并且能够处理各种各样的反应物。该反应堆还具有先进的控制系统，确保可重复和可预测的反应和结果。控制系统能够调整反应参数以微调过程和结果以优化收率。反应堆的先进设计包括一整套工艺室，每个室都配有加热、冷却和压力控制系统。这允许精确控制反应温度、反应时间和压力剖面。此外，高速气体输送是可能的。该反应堆的材料处理系统还包括一套材料分析系统，如SEM/EDS、TEM、FTIR、GCMS和XRD。这些系统允许在加工之前和之后快速对材料部分进行表征。这意味着可以快速采样和分析材料以进行精确的工艺优化。APPLIED MATERIALS Producer SE的设计旨在满足先进材料和设备制造商的需求,从而实现高容量、高产产量和提高生产率。是将实验室技术和实验转化为生产线的理想解决方桉。
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