二手 ASM Epsilon 2000 #9050020 待售
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ID: 9050020
晶圆大小: 8"
EPI Reactor, 8"
Model 26
Stand-alone, single wafer
Reactor module:
Model RP for reduced pressure processing and ATM processing
Vacuum load locks (scroll pump not included)
Clean-room front with color touch screen operator interface
(2) independent wafer cassette load locks
Right-hand maintenance access configuration
Automated wafer handling section with Bernoulli wand
VAT – reactor gate valve
Maintenance access: 2 0port in wafer handling chamber
Epitaxy process chamber, susceptor and related quartzware for 200mm wafer processing
Toshiba graphite: square
Observation windows on maintenance access doors in wafer handling and process chamber sections
68040-based computer
Operating system and software with 4.3 Gbyte hard disk drive
Multiport Injector Flange with water cooling circuit
Vibration Isolation Package
HCl detector: reactor module
Adjustable Spot Lamps
Gas control module:
Orbital welded 316L stainless steel, electropolished interior surface tubing
Line and component connections via metal-gasketed fittings
.003 micron point-of-use filtration
AERA mass flow controllers: Model 7810/7820
Gas sampling ports
Gas Loops:
Nitrogen (N2) purge
Hydrogen (H2) carrier and purge
Hydrogen chloride (HCl) wafer and chamber etch
Dopant #1, diborane (B2H6) P-dopant, diluent and inject
Do pant #2, phosphine (PH3) or arsine (AsH3) N-dopant, diluent and inject
Low flow hydrogen chloride (HCl)
Auxiliary silicon source, dichlorosilane (SiH2Cl2, gas)
Auxiliary loop for TCS with MFC and Lorex Piezocon controller
Advanced application valving
HCl detector – gas module
Precision Vent Matching
Power module:
Single point, 3-phase, 60 Hz, 480 VAC power input
Lamp array SCR packs
110 VAC/24 VAC power distribution circuits
Power and load protection devices
0 ft. (15.2m) of interconnect wiring harness for remote operation
Engineering console:
Color touch screen operator interface
Operator key lock control
Temperature control digital electronics
50 ft. (7.6m) of interconnect wiring harness for remote operation
Source cabinet with mini bubbler:
10-liter mini-bubbler
H2 Detector
HCl detector
TCS/DCS.
ASM Epsilon 2000是一种多功能反应堆，旨在满足广泛应用中的各种需求。它旨在成为一个可靠、低维护和安全运行的核反应堆，能够生产核技术所需的各种裂变材料和同位素浓缩燃料。Epsilon 2000是一种钠冷快堆。这类反应堆使用液态钠作为其冷却剂，使其能够在高于其他反应堆类型的温度下运行。它由一个双壁核心和一个钢筋安全壳容器构成，提供额外的安全和保护，免受外部来源的影响。此外，ASM Epsilon 2000利用各种控制系统，以确保其核心不超过其安全极限。与其他核反应堆相比，Epsilon 2000具有多项优势。它有85%的效率，意味着它能够用更少的燃料产生更多的能量。提高燃料经济性意味着降低运营成本和减少产生的废物，使其成为一种更具成本效益的反应堆选择。此外,ASM Epsilon 2000的设计允许更有效地利用燃料,这意味着它能够将更多的燃料转化为能源,而不是通过传热浪费能源。Epsilon 2000还具有多种安全特性，如应急核心停电系统和隔离区安全系统。有了这些特点，反应堆被设计成能够快速安全地应对紧急情况。此外，反应堆还有一个系统，可按照加油和维护程序运行，确保其内部部件得到妥善维护，并定期更换燃料。ASM Epsilon 2000是一个可靠的反应堆，能够为各种应用提供可靠、高效和具有成本效益的动力来源。其先进的安全系统和高效的燃料利用表明其致力于保护环境和用户的福祉。Epsilon 2000是核电生产的理想选择。
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