二手 ASM Epsilon E2000 #293695959 待售
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ID: 293695959
晶圆大小: 6"-8"
EPI Reactor, 6"-8"
SECS
E2 modified to E2000
Gas cabinet: TCS Bubbler
Hotwall
Bernoulli wall with AX motor drivers
Multi port injector
TESCOM Regulators
MKS Transducers
Gate valve
Swing valve
ATM
RH
Wafer sensing
SiHCl3 Bubbler cabinets
(2) LCD Monitors
Robot
Vacuum hose
Transfer chamber purge
System safety:
EMO Switch
EMO Guard ring
EMO Label
LL
WHC
CH
GP
Power module
Maintenance console
TCS Supply vessel
Gas Type:
H2
HCL
TCS
AsH3
B2
P-Dope,
(2) N-Dope,
Un-doped gas supply
Gas / MFC Size
H2/N2 / 200 SLM
Dopant 1 / 200 SCCM
Dopant 1 / 20 SLM
Dopant 1 / 200 SCCM
Dopant 2 / 200 SCCM
Dopant 2 / 20 SLM
Dopant 2 / 200 SCCM
HCL / 20 SLM
SiHCl3 / LVC 25 Gr/Min
SiH4 / 500 SCCM
H2 / 5 SLM
Operating system: OS9
Power supply: 480 V, 50 Hz, 150 A.
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