二手 LAM RESEARCH / NOVELLUS Sabre XT 200 #293825088 待售

Electro copper plating system, 8" Cu plating system Wafer type: Notch (2) Cassettes (4) Power supplies (3) Cells 26-Slots EBR SMIF-POD Wafer transport: Dry robot Plating cleaning: (3) PEM Dry in / dry out Backside cleaning PEM and cell unit: PVDF Chemical supply pump: 6～12L Monitoring with a flow meter Lifting and rotating mechanism EBR adjustment range: 2mm (max) EBR and backside cleaning mixture: H2SO4 / H2O2 Chemical analyzer Heater and chiller unit Temperature control Closed loop.