二手 MATTSON EpiPro 3000 #9003702 待售

Reactors Dual station Chamber: 94" x 50" x 62" R2 Reactor chamber: 94" x 50" x 62" Electrical console AC Power module Remote interface module UPS Module Pillar vacuum tube oscillator RF generators, 125 kW Generator pump module: (Pillar only) (2) Bell jars RF Coils assy and quartz Heat exchanger: Water to water Gas inlet requirements: Gas / Inlet pressure / Tubing diameter x wall thickness N2 / 50-100 PSIG (1) / 3/8" x 0.035" H2 / 50-80 PSIG (2) / 3/8" x 0.035" HCL / 15 PSIG Regulated (3) / 1/4" x 0.035" Dopants / 35 PSIG Regulated / 1/4" x 0.035" SiCl4 / 20 PSIG Regulated / 3/8" x 0.035" SiHCl3 / 20 PSIG Regulated / 3/8" x 0.035" SiH2Cl2 / 7 PSIG Minimum / 3/8" x 0.035" Pneumatic Air/N2 / 90-100 PSIG Regulated / 3/8" x 0.035" N2 (Vacuum seal) / 80-100 PSIG (3) / 1/4" x 0.035"(1) Gas purity: H2: Greater than 99.95% minimum assay Oxygen content must be less than 2 ppm Water content must be less than 2 ppm HCl: Greater than 99.99% (semiconductor grade) Silicon sources – Greater than 100 ohm/cm intrinsic Dopants: Greater than 99.99% H2 free basis Maximum gas flows and volumes: System / H2 / N2 / H2 / N2 Mainstream / 300 / 70 (2) / 300 / 70 High flow bypass (Fixed) / 200 / 100 (1) / 200 / 100 (1) SiCl4 / SiHCl3 Carrier / 30 / - / - / - Dopants dilution / 30 / - / - / - RF Coil / Lower reactor purges / 30 / 10 / 30 / 10 Gas panel purges (Fixed) / 12 / 4 / - / - Rotation purges (Fixed) / 10 / 2 / 10 / 2 Total N2/H2 flows / 612 / 186 / 540 / 182 (1) N2 flow rate during pre-post purge Quartz cleaning facility: Pedestal / 30-0R-281 / 4 1/2" diameter x 12" long Support rod / 30-0R-139 / 1" diameter x 5" long Coil cover / 30-0Z-000 / 25" diameter x 2" thick Insulator, high Side / 30-0Z-857 / 3" diameter x 6" long Insulator, bottom / 30-0Z-766 / 4 1/2" diameter x 1/4" thick Insulator, top / 30-0Z-791 / 4 1/2" diameter x 1/4" thick Insulator, high side / 30-0Z-793 / 5" x 4" Insulator, middle / 30-0Z-794 / 5" x 4" Inject tube / 30-0Z-758 / 1/2" diameter x 11" long Tube cover / 30-0Z-1037 / 1/2" diameter x 9" long Rod, fiber optic / 30-0Z-1037 / 1/4" diameter x 13" Power requirements: RF Generator: 480 VAC, 400 A, 3-Phase, +GND Water system: 480 VAC, 30 A, 3-Phase, +GND Electrical service: 10 KVA at 200-240 VAC, 50 amps, 50/60 Hz, single phase, 3 wire (6 ga) plus ground.