二手 NOVELLUS C2 #293812977 待售
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ID: 293812977
晶圆大小: 8"
优质的: 2006
Dual sequel express system, 8"
(2) Sequel Express process chambers (Chambers A and B)
(1) Empty chamber position (Chamber C)
Brooks LPT 2200 Standard Mechanical Interface (SMIF)
Shuttle type cassette loading
Mag-7 dual blade buffer robot
(2) MKS 10 / 1000 Torr pressure gauges
(2) AE Mercury 3013 Radio Frequency (RF) matchers
(2) AE RFG 5500 High Frequency (HF) generators
(2) AE PDX-1400 Low Frequency (LF) generators
(2) Watlow heater controllers
(2) Sigma-6 Tetraethyl Orthosilicate (TEOS) liquid options
PDP type Alternating Current (AC) rack
(14) FC-7800CD Mass Flow Controllers (MFCs)
Gas sticks for N2O, O2, N2, C2F6, NH3, and SiH4
2006 vintage.
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