二手 NOVELLUS CONCEPT 2 Altus #181297 待售

Dual Shrink W-CVD Chemical vapor deposition system, 8" Chamber Location 1 Station Left Loadlock 2 station Process Module 3 station Process Module 4 station Right Loadlock 5 Station Cooling Sation Electrical Requirements AC power Voltage 208 VAC DLCM Configuration Indexer Type: Animatic Controller Brooks Robot Type: Mag7 Host Interface: GEN/SECS Controller Type : P166/64M/QNX4 DLCMS Type: Only Hi Module Interface Type: Arc-net Type IOC : Ver 4.1 TM Manometer 1 torr/ 100mtorr: Tylan General L/L Manometer 100torr: Tylan General L/L Convectron: Not Install Module Door Type: SMC L-Motion Chamber A: Process Option BLKT Clean Option Insuts Clean MOER Ceramic M/A / M/B (Not Used) Throttle Valve Type Tylan General 1ea MFC Type & Size Brooks 5964: Ar (5000Sccm) Ar (10000Sccm) Area FC980C: NH3 (150Sccm) Brooks 5964: Ar (10000Sccm) Ar (20000Sccm) Ar (20000Sccm) H2 (20000Sccm) H2 (20000Sccm) Area FC980C: B2H6, N2 (750Sccm) Brooks 5964: C2F6 (2000Sccm) SAM MC4VLZ24: WF6 (1000Sccm) Brooks 5964: O2 (2000Sccm) SiH4 (1500Sccm) SFC1480FPD: SiH4 (300Sccm) Slip Valve Type: SMC L-Motion Chamber B: Process Option BLKT Clean Option Insuts Clean MOER Ceramic M/A / M/B (Not Used) Throttle Valve Type Tylan General 1ea MFC Type & Size SPEC 7330: Ar (5000Sccm) Ar (5000Sccm) NH3 (1000Sccm) NH3 (1000Sccm) Ar (20000Sccm) Ar (5000Sccm) Ar (15000Sccm) H2 (5000Sccm) H2 (20000Sccm) B2H6, N2 (750Sccm) C2F6 (2000Sccm) WF6 (750Sccm) O2 (2000Sccm) SiH4 (1000Sccm) Slip Valve Type SMC: L-Motion 1996 vintage.