二手 NOVELLUS CONCEPT 2 Altus #9095522 待售

Chemical vapor deposition (CVD) system, 8" Process: Shrink DLCM Non-shrink process modules SSD Module: Dual chamber Wafer type: Notch SECS/GEM Software: No Standard chamber Mainframe options: System controller: MC3 Signal tower: No AC Power rack: Standard Interconnect cables: No DLCM User interface: Adjacent to system Transfer robot type: BROOKS MTR 5 Paddle type: Standard Shuttle type: Standard Cassette type: No Indexer type: Type II Cool station: No SMIF loader type: No Manometer: Standard 100 Torr Facilities configuration: Either Control system: QNX4 Pump electrical interface: No Missing parts: Animatics type Leak check shutoff valve Process module A: Altus Controller type: MC3 IOC Version: 3.02 Gate and throttle valve: Internal, non-heated Process manometer: 100 Torr non-heated Heater pedestals: D-Type Shower heads: Yes MOER Rings: No Spindle assy seal type: Ferrofluidic X-Y Centering station: Yes Viewport window: Sapphire RF Match: Trazar Chamber process: Tungsten plug fill Full face coverage Module location: Center port Standard footprint Facility connections: Rear of chamber Module location: Center port (default) Missing parts: RF High frequency generator Endpoint detector Gas box: Standard 10 channel MFC Type: BROOKS 5964 MFC Size and location Channel Gas Flow (SLM) 1 Argon 2 SLM 2 Sih4 50 sccm 3 Hydrogen 20 SLM 4 Argon 20 SLM 5 Wf6 Missing 6 C2F6 2 SLM 7 Oxygen S SLM 8 Argon 10 SLM 9 Hydrogen 20 SLM 10 Nitrogen 10 SLM Process module B: Altus Gate and throttle valve: Internal, non-heated Process manometer: 100 Torr non-heated Heater pedestals: D-Type Shower heads: Yes MOER Rings: No Spindle assy seal type: Ferrofluidic X-Y Centering station: Yes Viewport window: Sapphire RF Match: Trazar Chamber process: Tungsten plug fill MOER Rings Sequel process module A center port Standard footprint RF Generator: No Optical endpoint detector: Yes Facility connections: Rear of chamber Module location: Right port Missing parts: RF High frequency generator Controller type Gas box: Standard 10 channel 10 Gas, missing 9 gas sticks MFC Size and location Channel Gas Flow (SLM) 5 Wf6 750 sccm (1-10) Missing.