用過的 NOVELLUS Concept 2 Dual Speed Sequel #9314381 出售

ID#: 9314381

製造商:

NOVELLUS

類別:

REACTORS

釀酒:

2000

晶圓尺寸:

8"

设备详细信息:

CVD System, 8"

Mainframe
Gas box: Standard with dual divert
Robot: Express dual blade
Cool down: 3 Slots
Endpoint: Dual wavelength endpoint

Sequel chamber:
Sequel express TEOS
Sigma 6 TEOS Cabinet

(2) Speed chambers
PFEIFFER 1600L Turbo

2000 vintage.
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