二手 NOVELLUS CONCEPT 2 Sequel Express #9256798 待售
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ID: 9256798
晶圆大小: 8"
System, 8"
Process type: PEOX
(2) Chambers
LCD Monitor, 12.1"
Signal tower type: Front Mount
DLCM:
P166/64M Module controller
Cassette transfer: Shuttle type
TM Robot: Magnatran 7 003-1600-25
Indexer robot: Indexer type II
Motor type: Belt
Animatics: CDP2407-2
Arc bar: 26 Slots
Cassette mapping: Auto mapping
MKS 750B11TCE2GK 10 Torr Manometer
GRANVILLE PHILLIPS 275 Mini convectron
TYLAN ACX3200 Throttle valve controller
Slit valve type: Loadlock VAT/CH SMC
IOC: 27-10157-00 Ver4.1
CVD1:
ADVANCED ENERGY MN3150274-004 B RF Match network
View port left/Right
RF Distribution
Gas distribution
Mix bowl type: Not heated
(6) Shower heads
Heater block
Process chamber ring
MESC Flange
MKS 627A13TBC Manometer, 1000 Torr
MKS 627A11TBC Manometer, 10 Torr
UE PV48W-14 Switch, vacuum, atmosphere
UE E48W-H14 Switch, vacuum, 15 Torr
End point detector VM3200 Integrated dual wavelength EPD
(3) IOC: 27-10157-00 Ver 4.1
Controller, throttle valve
Interlock PCB, CVD 02-123072-00 Rev A
P166/64M Module controller
Water flow switch
Gate valve, Hi vac, 4"
Throttle valve
Spindle mechanism Ferrofluidic bellows type
Process chamber 4-line type: Vertical
Process chamber exhaust type: Vertical
EUROTHERM Temperature controller
Hastings gauge
ADVANCED ENERGY PDX 1400, P/N 27-028379-00 F/R C RF Generator
ADVANCED ENERGY RFG 5500, P/N 27-115617-00 F/R A Generator rack
CVD2:
ADVANCED ENERGY MN3150274-004 B RF Match network
View port left/Right
RF Distribution
Gas distribution
Mixbowl type: Temperature setting
(6) Shower heads
Heater block
Process chamber ring
MESC Flange
MKS 627A13TBC Manometer, 1000 Torr
MKS 627A11TBC Manometer, 10 Torr
UE PV48W-14 Switch, vacuum, atmosphere
UE E48W-H14 Switch, vacuum, 15 Torr
End point detector VM3200 Integrated dual wavelength EPD
(3) IOC: 27-10157-00 Ver 4.1
Controller, throttle valve
Interlock PCB, CVD 02-123072-00 Rev A
P166/64M Module controller
Water flow switch
Gate valve, Hi vac, 4"
Throttle valve
Spindle mechanism Ferrofluidic bellows type
Process chamber 4-line type: Vertical
Process chamber exhaust type: Vertical
EUROTHERM Temperature controller
Hastings gauge
ADVANCED ENERGY PDX 1400, P/N 27-028379-00 F/R C RF Generator
ADVANCED ENERGY RFG 5500, P/N 27-115617-00 F/R A Generator rack
CVD1 / CVD2:
MFC (AERA):
SiH4 / FC-7800CD, 1 SLM
N2 / FC-7800CD, 5 SLM
He / FC-7800CD, 10 SLM
NH3 / FC-7800CD, 10 SLM
O2 / FC-7800CD, 20 SLM
C2F6 / FC-7800CD, 5 SLM
N2O / FC-7800CD, 20 SLM
N2 / FC-7800CD, 10 SLM
SSD:
MSSD 01-132945-00 with UPS
Power:
208 VAC, 3 Phase, 5 wires, 50 Hz, 1000 kV
208 VAC (CVCF), Single phase, UPS 50 Hz, 20 A.
NOVELLUS CONCEPT 2 Sequel Express是一款先进的沉积反应器，旨在为介电、屏障和金属薄膜的沉积提供最佳的工艺灵活性和最大的正常运行时间。其高效率的设计使晶片的吞吐量以相当高的薄膜沉积速率提高。该反应堆采用了一系列管状反应堆，专门为确保经济高效的过程灵活性和优越的控制而设计。其先进的特点包括高速脉冲、减少循环时间，以及能够在整个晶片上精确管理薄膜沉积和均匀性。反应堆有一个管状加工室，分为四个单独可编程的通量区域成一个连续管。这提供了在一个循环中沉积多个薄膜或在不同的通量区域中处理不同的层的能力。腔室能够支撑从真空到压力的压力，以及从室温到500 °C的温度。此外,它还允许水平和垂直方向的晶圆处理。反应堆拥有先进的闭环过程控制设备，提供精确的过程管理，以管理沉积速率、层均匀性和沉积速率剖面。它包括反馈和前馈控制等算法，确保在处理过程中对所有这些方面进行精确调整。该系统还允许对进程进行远程监测和控制。CONCEPT 2 Sequel Express设计为拥有低成本以及高级安全功能。它旨在提供最大化的生产效率,同时也将任何潜在的安全风险降至最低。它配备了一个自我保护单元以及错误预防和限制功能，以确保机器在任何时候都能安全运行。最后，该反应器旨在在短周期内提供具有成本效益的薄膜沉积溶液。它能够支持多种材料,并且能够自动更改工具集,使其成为一种高度可配置且用途广泛的工具。NOVELLUS CONCEPT 2 Sequel Express具有先进的控制和安全特性、高晶圆吞吐量和经济效益,是各种沉积应用的理想选择。
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