二手 NOVELLUS CONCEPT 2 Speed #9140633 待售

NOVELLUS CONCEPT 2 Speed
反应器
製造商
NOVELLUS
模型
CONCEPT 2 Speed
ID: 9140633
晶圆大小: 8"
优质的: 2000
Systems, 8" (3) Chambers Wafer shape: flat PET Module Module A: Shrink Process A: STI / IMD Module C: Shrink Process C: STI / IMD System UPS power Module B: Shrink Process B: STI / IMD Loadlock dry pump: LOT 105 Slit valve insert Slit valve type: SMC L-Motion TM dry pump model: LOT 105 Loadlock baratron: MKS TM Turbo pump: PFEIFFER TMH260 TM Throttle valve: MKS TM Baratron model: MKS Wafer sensor Fab installation EMO's (Turn to release) Front monitor: Stand alone UI rack Signal tower Module controller: MC1 Host interface: SECS Module A: Chamber type: Shrink Chamber process: STI / IMD Process clean type: In-situ Module controller: MC1 Module turbo pump: MAG2000 Manometer 1(10T): MKS7 750B Throttle valve: MKS 153D-15973 ESC / Dome cooling: PCW Temperature monitoring: NTM500C Manometer 2(10T): MKS 750B HF Generator: AE RFG5500 LF Generator: AE PDX 8000 RF Match: Mercury 3013 Manometer 3(100m): MKS 629B Dual clean injector kit Injector type: Single Louvered screen Pedestal lift type: Dual position Foreline type: Universal Injector size: 2" Module B: Chamber type: Shrink Chamber process: STI / IMD Process clean type: In-situ Module controller: MC1 Module turbo pump: MAG2000 Manometer 1(10T): MKS7 750B Throttle valve: MKS 153D-15973 ESC / Dome cooling: PCW Temperature monitoring: NTM500C Manometer 2(10T): MKS 750B HF Generator: AE RFG5500 LF Generator: AE PDX 8000 RF Match: Mercury 3013 Manometer 3(100m): MKS 629B Dual clean injector kit Injector type: Single Louvered screen Pedestal lift type: Dual position Foreline type: Universal Injector size: 2" Module C: Chamber type: Shrink Chamber process: STI / IMD Process clean type: In-situ Module controller: MC1 Module turbo pump: MAG2000 Manometer 1(10T): MKS7 750B Throttle valve: MKS 153D-15973 ESC / Dome cooling: PCW Temperature monitoring: NTM500C Manometer 2(10T): MKS 750B HF Generator: AE RFG5500 LF Generator: AE PDX 8000 RF Match: Mercury 3013 Manometer 3(100m): MKS 629B Dual clean injector kit Injector type: Single Louvered screen Pedestal lift type: Dual position Foreline type: Universal Injector size: 2" Power supply: 3￠, 5 Wires, 208V 2000 vintage.
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NOVELLUS CONCEPT 2 Speed是一种化学气相沉积（CVD）反应器设备，设计用于在大型基板上建造保形薄膜。该系统的设计提供了高吞吐量和优越的工艺控制整个基板表面。CONCEPT 2速度反应堆采用模块化设计，使用户能够配置其沉积系统，以最好地满足其确切要求。NOVELLUS CONCEPT 2 Speed Reactor features a low-pressure CVD chamber which is agained a single-line, single-pass showerhead.淋浴头能够迅速均匀地向整个基质分配化学物质。这种高效的气体分配技术有助于消除边缘效应，并在整个表面提供均匀、均匀的沉积速率。CONCEPT 2 Speed仅使用最优质的设备构建。它旨在满足最严格的质量控制要求，并确保精确和可重复的沉积过程。该装置还设计为高效，使用户能够更快地用更少的材料制作更多的金属化薄膜，从而节省时间和金钱。NOVELLUS CONCEPT 2 Speed Reactor包括一台先进的过程控制机，旨在最大限度地提高过程性能和过程产量。该工具具有可靠的多参数过程控制模块以及直观的用户界面。此外,还可以将资产配置为允许远程监视、多腔同步和实时收益管理。CONCEPT 2 Speed非常适合广泛的行业使用，包括微电子和太阳能电池板生产。该模型可与现有的NOVELLUS Foundry解决方桉集成,为用户提供满足其所有沉积需求的单一来源。NOVELLUS CONCEPT 2 Speed反应器先进的腔室设计和工艺控制为用户提供了高重复效率的优越保形薄膜沉积。
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