二手 NOVELLUS CONCEPT 2 #9004475 待售

CVD system, 8" Dual-Speed-S SiO2 Process chamber Gas configuration: 1 Ar 500 sccm 2 O2 500 sccm 3 NF3 1 slm 4 SiH4 200 sccm 5 He 500 sccm 8 H2 2 slm MFC: Aera/FC-7800CD NC, Metal Seals 1/4”MVCR, 9pin D-Type Conn 10μin Ra (2) SPEED-S Module (STI): Module Controller Reactor Chamber Gas Box Exhaust System Pressure Measurement System LPB (Local Power Box) RF Supply & Output System APC (Auto Pressure Controller) Vent N2 Supply System He Supply System for ESC Temperature Measurement (NTM3) Cooling Water Supply System Compressed Air Supply System DLCM-X Module (Hi/Low Type) with SMIF: Standard SMIF TM Aligner System Controller (UI I/F) Module Controller (2) Load-lock Chambers Transfer Chamber Transfer Robot (Indexer for L/L x 2, Mag for TM x1) Slit Valve Turbo Pump (TMH260) Purge Gas, Vent Gas Supply System Cooling Water Supply System Compressed Air Supply System Exhaust System Pressure Measurement System Cooling Station LPB (Local Power Box) APC (Auto Pressure Controller) RF Generator HF Generator: (2) RFG 5500/AE LF Generator: CLF-5000/COMDEL Module single service drop, MSSD Δ-Y Transformer (Type 3-628941, 100KVA) UPS (“NemieLambda”PS-3210, “Hakkosha” 3WTC-10K) (2) SMIF Robots (Asyst) Missing / defects: Ch-1: HF generator failure, No HF Matching, No Coaxial Cable Ch-2: Isolation valve failure (100mTorr) 2000 vintage.