二手 NOVELLUS CONCEPT 2 #9069052 待售

CVD system, 8" Includes: Wafer shape: Flat SMIF Interface: No Aligner: No System main power: 3-Ph, 5-wires, 208 V Module A: Standard Process A: Sio2 Module B: Standard Process B: Sio2 TM Throttle valve: TYLAN TM Robot type: MTR5 TM Robot blade: Ceramic Wafer sensor: Existence Loadlock baratro model: 275 Mini convectron TM Baratron model: Tylan 100 Torr EMO: Turn to release DLCM IOC Version: 4.0 Module controller: MC1 P100 Front monitor: Side Module A: Chamber type: Standard Module controller: MC1 Process type: SIO2/SIN Manometer: Mykrolis, 10 Torr Manometer: Tylan 1000 Torr Process clean type: In-Situ HF Generator: OEM-28 Heater block type: 6-Station Endpoint option: N/A Spindle top plate type: (1) Piece Spindle type: Ferroflo seal Throttle valve: Tylan RF Matcher: AMU2-1 IOC Version: IOC0: 4.1 IOC1: 4.1 IOC2: N/A LF Generator: PL-2HF Foreline gate valve: VAT Chamber gas box: MFC # | Gas name | MFC size | MFC model MFC B, N2, 10 SLM, Brooks 5964 MFC A, N2O, 20 SLM, Brooks 5964 MFC 9, C3F8, 2 SLM, Brooks 5964 MFC 8, O2, 3 SLM, Brooks 5964 MFC 6, NH3, 10 SLM, Brooks 5964 MFC 2, N2, 5 SLM, Brooks 5964 MFC 1, SIH4, 1 SLM, Unit UFC 8160 Module B: Chamber type: Standard Module controller: MC1 Process type: SIO2/SIN Manometer: Mykrolis, 10 Torr Manometer: Tylan 1000 Torr Process clean type: In-Situ HF Generator: OEM-28 Heater block type: 6-Station Endpoint option: N/A Spindle top plate type: (1) Piece Spindle type: Ferroflo seal Throttle valve: Tylan RF Matcher: AMU2-1 IOC Version: IOC0: 4.1 IOC1: 4.1 IOC2: N/A LF Generator: PL-2HF Foreline gate valve: VAT Chamber gas box: MFC # | Gas name | MFC size | MFC model MFC B, N2, 10 SLM, Brooks 5964 MFC A, N2O, 20 SLM, Brooks 5964 MFC 9, C3F8, 2 SLM, Brooks 5964 MFC 8, O2, 3 SLM, Brooks 5964 MFC 6, NH3, 10 SLM, Brooks 5964 MFC 2, N2, 5 SLM, Brooks 5964 MFC 1, SIH4, 1 SLM, Unit UFC 8160.