二手 NOVELLUS CONCEPT 3 INOVA-xT #9259673 待售
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ID: 9259673
晶圆大小: 12"
优质的: 2004
PVD System, 12"
Process: AL, TI(N)
Degas: Left and right
(2) Q300 AL
Q300 TIN
HCM TIN
HCM TAN
Cooler
EFEM / WTS-HV
EFEM:
Load port: (3) FOUPs
User interface location: Right with keyboard, mouse and monitor
User interface configuration: Clean room wall interface
(25) Wafers / FOUPs
BROOKS AUTOMATION Magnatran 7 ATM Robot
PEC Station
17-PEC Slots
Robot traverser
WTS-HV:
(2) Magnatran 7 Robots
Robot blades: Ceramic, dual
Cryo HUB
CTI-CRYOGENICS IS-8F (On-Board) Cryo pump
(6) VAT Isolation valves
Left and right load lock:
(2) PFEIFFER TMH 071P Turbo pumps
(2) VAT Isolation valves
Left and right degas:
(2) PFEIFFER TMU 521P Turbo pumps
(2) VAT Isolation valves
PFEIFFER / BALZERS TMH 071P Turbo pump
(2) Q300 AL and Q300 TIN:
On-Board Cryo pump
VARIAN V250 Turbo pump
On-Board Controller
Trust controller
MKS 649 Pressure controller
LPB
SIOC
ESC Pedestal
Mass flow controller: Ar, 200 SCCM
AERA FC-980C Mass flow controller: N2, 200 SCCM
AERA FC-980C UPC: 300 SCCM
INFICON Ion gauge
ANAFAZER Module
HCM TI and HCM TAN:
On-Board Cryo pump
VARIAN V250 Turbo pump
On-Board Controller
Trust controller
MKS 649 Pressure controller
LPB
SIOC
ESC Pedestal
Mass flow controller: Ar, 200 SCCM
MKS Mass flow controller: N2, 200 SCCM
AERA FC-980C UPC: 300 SCCM
AERA FC-980C Ion gauge
Anafazer Module
Miscellaneous parts:
AFFINITY EWA-23DK-HE04CBC Chiller
(3) POLYCOLD 1XCL Chillers
(4) CTI 9600 Compressors
Vacuum jacket lines
Cable box
Shield box
Spare parts
Desktop PC
MPD (WTS-HV)
General rack:
(2) ADVANCED ENERGY RFG 1251 RF Generators, P/N: 27-156759-00 / 3155107-101
Electric cabinet rack (Q300 AL):
TREK 684-1 ESC Power supply
CPI CPW2870B10 DC Power supply
Electric cabinet rack (Q300 TIN):
CPI CPW2870B10 DC Power supply
(2) Electric cabinet racks (HCM):
TREK 684 ESC Power supply
CPI CPW2870B10 DC Power supplies
(8) SORENSEN DLM 60-10 EM Coil power supplies
Missing parts:
BROOKS AUTOMATION Magnatran 7 Robot
2004 vintage.
NOVELLUS Concept 3 Inova XT是一个创新的反应堆，旨在扩展逻辑缩放技术的极限。反应堆使用模内蚀刻工艺来控制半导体晶片上特征的形状、大小和轮廓。Inova XT反应器是微型化应用的理想选择。Inova XT反应堆采用了独特的专利通量腔设计，使其能够实现高精度的精密蚀刻。反应堆由等离子体源组成，该等离子体源与可由单个操作员控制的航向和精细喷嘴设备集成在一起。该系统能够产生明确定义的蚀刻轮廓,同时保持严格控制的蚀刻速率。Inova XT反应堆是为满足先进工艺日益严格的要求而量身定制的。反应堆设有一个内置的浴缸蚀刻装置，可主动清除最后的液滴和污染物。消除与其他反应堆相关的溷乱。这台机器还有助于防止污染，提高晶片对晶片的可重复性。Inova XT还能同时蚀刻，以及交错蚀刻。交错蚀刻允许操作员最小化拐角舍入并提高小型特征尺寸的吞吐量。反应堆的Flex-Etch技术还允许为特定应用定制配方创建。这允许用户量身定制蚀刻工艺，以满足其特定工艺或基材的需求。Inova XT还拥有经济高效的解决方桉设计。它的独特架构大大减少了其他反应堆通常需要的零件和泵的数量。这减少了运营费用和能耗。此外，反应堆还包括内置的自适应灵活性，以减少过程间切换所需的时间。概念3 Inova XT是一个令人难以置信的蚀刻反应器，它以蚀刻特性的效率提供了晶片的精确度。Inova XT反应器凭借其专利的通量腔设计和内置的沐浴蚀刻工具，是一种经济高效的解决方桉，可以帮助半导体制造商在降低能源成本的情况下实现针点精度、优越的重复性和提高吞吐量。
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