二手 NOVELLUS Concept 3 Speed Max #9259681 待售
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ID: 9259681
CVD System, 12"
Wafer type: Notch
Signal tower
PEC Module
Foop: BROOKS AUTOMATION
Foop type: 3-Port
BROOKS Magnatran 7 TM Robot
TM Robot blade: Ceramic
Load lock convectron: 275 min
L/L Baratron: MKS
TM Baratron: MKS
L/L Slit valve type: VAT
Module slit valve type: SMC
PFEIFFER TM Turbo pump
MKS TM Throttle valve
VAT TM Line valve
BROOKS AUTOMATION ATM Robot
ATM Robot blade: Arm metal
AWC Sensor
UI Type: LCD
EMO's: Push button
Host interface: SECS
Chaser: CRT Monitor
IOC Version: 4.72
SSD Type: C3-PDRS
(3) SMC XGT300-30-1A-X2 TM Value, P/N: 60-251903-00
Load lock value: VAT 03012-LA24-0001/0503, A-62591
Chamber A, B and C:
Chamber type: Speed max
Chamber process: ILD
ESC Type: Notch
Manometer (10T): MKS
Manometer (30T): MKS
Manometer (100m): MKS
Throttle valve: NC TBV-IQA-200-NW-50
Dual pedestal lift
LEYBOLD MAG200CT Turbo pump
ESC / Dome Cooling
Dual clean injector kit: Single RPC
Process clean type: RPC
Temperature monitoring: Dome monitor 201
ADVANCED ENERGY 10013 Navigator RF Match
VERITY EPD, P/N: 1005972
Black shield
MOOG SMART Motor
No module dry pump
Chamber A:
Type / Make / Model / Gases / Size
MFC / BROOKS AUTOMATION / SLA 7950S / O2 / 500 SCCM
MFC / BROOKS AUTOMATION / SLA 7950S / NF3 / 5 SLM
MFC / BROOKS AUTOMATION / SLA 7950S / H2/CF: 0.727 / 1.5 SLPM
MFC / BROOKS AUTOMATION / SLA 7950S / Ar / 3000 SCCM
MFC / HORIBA / Stec (Z500, SEC-Z512MGX) / N2 / 300 SCCM
MFC / HORIBA / Stec (Z500, SEC-Z512MGX) / SiH4 / 200 SCCM
MFC / BROOKS AUTOMATION / SLA 7950S / Ar / 500 SCCM
MFC / BROOKS AUTOMATION / SLA 7950S / HE / 1000 SCCM
Chamber B:
Type / Make / Model / Gases / Size
MFC / BROOKS AUTOMATION / SLA 7950S / O2 / 500 SCCM
MFC / BROOKS AUTOMATION / SLA 7950S / NF3 / 5 SLM
MFC / BROOKS AUTOMATION / SLA 7950S / H2 / 1500 SCCM
MFC / BROOKS AUTOMATION / SLA 7950S / Ar / 3 SLPM
MFC / BROOKS AUTOMATION / SLA 7950S / SiH4 / 100 SCCM
MFC / BROOKS AUTOMATION / SLA 7950S / SiH4 / 200 SCCM
MFC / BROOKS AUTOMATION / SLA 7950S / Ar / 500 SCCM
UPC / BROOKS AUTOMATION / SLA 7950S / HE / 1000 SCCM
Chamber C:
Type / Make / Model / Gases / Size
MFC / BROOKS AUTOMATION / SLA 7950S / O2 / 500 SCCM
MFC / BROOKS AUTOMATION / SLA 7950S / NF3 / 0.5 SLPM
MFC / BROOKS AUTOMATION / SLA 7950S / H2 / 1500 SCCM
MFC / BROOKS AUTOMATION / SLA 7950S / Ar / 3000 SCCM
MFC / BROOKS AUTOMATION / SLA 7950S / SiH4 / 100 SCCM
MFC / BROOKS AUTOMATION / SLA 7950S / SiH4 / 200 SCCM
MFC / BROOKS AUTOMATION / SLA 7950S / Ar / 500 SCCM
UPC / BROOKS AUTOMATION / SLA 7950S / HE / 1000 SCCM
Missing parts:
MC3 Controller: MKS AX7670-21 3L Remote Plasma Source (RPS)
NTM Delta controller
PDX 5000 / PDX 8000 / Apex 10K Generators
Turbo pump controllers
Missing parts for chamber A, B and C:
Apex 10013 HF Generator
PDX 8000 MF Generator
PDX 5000 LF Generator
NTM
Uninterruptable Power Supply (UPS): 208 V, 50/60 Hz, 4-Wires
Power supply: 208 V, 50/60 Hz, 5-Wires
2007 vintage.
NOVELLUS Concept 3 Speed Max是一种先进的化学气相沉积（CVD）反应器，设计具有改进的材料膜形成和工艺时间缩短能力。它主要用于半导体工业，特别是用于电介质和金属的沉积。Speed Max反应堆由反应室、过程气体输送设备、控制系统和加热单元组成。反应室是一个玻璃封闭的不锈钢容器，配有自动附件，以确保准确的沉积速率。该工艺气体输送机能够控制和调节气体压力、温度和湿度。加热工具功能强大,可维持整个腔室的均匀温度。反应堆还配备了先进的控制资产，能够准确处理工艺压力、温度、气流以及沉积速率等工艺参数。对腔室条件的实时监测，包括温度、压力和气流，也可以通过这个模型进行。Speed Max还具有独特的批处理式沉积,旨在最大程度地减少材料沉积时间。反应堆可以预先编程，以预定的批次沉积薄膜，从而实现更快的自动化生产。此外，该设备还可以配置多个基板支架，以进一步加快这一过程。该反应器还被设计为提供卓越的工艺重复性，这对于确保令人满意的薄膜形成至关重要。此外,系统的高级软件可确保可重复的过程结果,而不管环境条件如何。最后,该软件还有助于诊断和优化任何潜在的流程问题。概念3 Speed Max是功能强大且高度先进的反应堆，也是半导体制造商必备的。它保证了最精确、最快速的沉积过程，并具有可重复的结果。Speed Max现在为那些正在寻找最新沉积方法的业界人士提供了竞争优势。
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