二手 NOVELLUS Concept 3 Speed NEXT #9203466 待售

CVD System, 12" System information: Process: STI/IMD Slit valve type: SMC L-Motion TM Turbo pump model: PFEIFFER TMH261 PXS TM Throttle valve model: MKS TM Baratron model: MKS Loadlock baratron: MKS IOC Version: V 4.6 TM Robot type: Mag 7 TM Robot blade: Ceramic Wafer sensor: Existence Single tower Front monitor: 12" LCD Fab EMO's: Push button Host interface: GEM ATM Robot: ATR8 VAC Robot: MAG 7 Loadlock valve: SMC ATM Loadlock valve: VAT Pod loader: BROOKS Fixload 6M Module A / B / C: Chamber type: NeXT Chamber Process: SIT/IMP Process clean type: NPP RPC Module controller: MC3 Module turbo pump: LEYBOLD MAGW2000CT Pendulum valve: MKS Temperature monitoring: NTM500 HF Generator: AE 10K MF Generator: AE PDX_5000 LF Generator: AE PDX_8Q00 RF Match: AE Navigator 10013 U IOC Version: V4.72 Dual clean injector kit Injector type: Star short Louvered screen Pedestal lift type: Servo motor Foreline type: Large EPD Black shield Module A: Chamber gas box: MFC Gas MFC Size MFC Model MFC1 SiH4 100 sccm BROOKS SLA7950S MFC2 SiH4 200 sccm BROOKS SLA7950S MFC8 Ar 3000 sccm BROOKS SLA7950S MFC5 H2 1500 sccm BROOKS GF125C MFC3 NF3 5000 sccm BROOKS SLA7950S MFC9 02 500 sccm BROOKS SLA7950S MFC6 Ar 500 sccm BROOKS SLA7950S MFC7 HE 1000 sccm BROOKS SLA7950S Module B: Chamber gas box: MFC Gas MFC Size MFC Model MFC1 SiH4 100 sccm BROOKS GF125C MFC8 Ar 3000 sccm BROOKS SLA7950S MFC5 H2 1500 sccm BROOKS SLA7950S MFC3 NF3 5000 sccm BROOKS GF125C MFC9 02 500 sccm BROOKS SLA7950S MFC7 HE 1000 sccm BROOKS SLA7950S Module C: Chamber gas box: MFC Gas MFC Size MFC Model MFC1 SiH4 100 sccm BROOKS SLA7950S MFC2 SiH4 200 sccm BROOKS SLA7950S MFC8 Ar 3000 sccm BROOKS GF125C MFC5 H2 1500 sccm BROOKS GF125C MFC3 NF3 5000 sccm BROOKS GF125C MFC9 02 500 sccm BROOKS SLA7950S MFC6 Ar 500 sccm BROOKS SLA7950S MFC7 HE 1000 sccm BROOKS SLA7950S UPS Power: 120 V, 3￠, 3 Wires Power: 208 V, 3￠, 5 Wires 2005 vintage.