二手 NOVELLUS Concept 3 Triple Speed #9237847 待售

HDPCVD System, 12" Main mini environment platform (3) Loader systems: ASYST IsoPort Handler system: BROOKS AUTOMATION Magnatran 7 Wafer shape: SNNF (3) Exhausts: Bottom feed Cooling water: PCW User interface Windows NT Mainframe: Control system: Ethernet MF FAC Routing: Front, Through-the-floor Front end robot: BROOKS AUTOMATION Magnatran 7 Load lock & Front end option: Load locks: C3 WTM Standard SWLL SECS / GEM Signal tower Pod type: 25 Wafers (2) FOUP BROOKS AUTOMATION Fix load 6M System controller: Controller type: Enhanced (NT) with HSMS & GEM Controller UPS: YES -FAC UPS INF Electrical INF: Bottom feed AC cables System EMO type: Push, Turn to release style EMO Guard ring option Transfer chamber: (3) PEC Stations Transfer chamber manual lid lift Robot blade: Dual blade with minimum contact Robot type: BROOKS AUTOMATION Magnatran 7 Pumps: Fore-line heat trace: YES-105C Chamber A / B / C: Chamber type: SPEED HDP ILD Process kit: NanoFill II ESC: HEX ESC TEMP Monitor: ATC NTM Delta Manifold D orifice: 0.020" For long injector Manifold G orifice: 0.028" For short injector RF Generator HF: ADVANCED ENERGY APEX 10 kW RF Generator LF: ADVANCED ENERGY PDX 8000 8 kW Pedestal heights: 1.35" Dome matching network: High power dome Turbo screen: Louvered screen (2) Turbo pumps: LEYBOLD MAG2000 Pressure controller: Throttle valve: MKS 153D Manometer: MKS 10 Torr / 100 mT Pressure gauge: DATUM 2000 Dual CH Gate valve: VAT Pendulum valve Slit valve o-ring: CHEMREZ Nozzle: (6) Long & (24) Short injectors Missing parts: (3) 05-363589-00 / Retrokit, coulombic ESC (3) 796-212642-001 / VLV, VAC, VAT, Bonded K910 (3) 04-353972-00 / KIT, Pendulum valve, ISOLA Line voltage: 208 VAC / 60 Hz CE Marked.