二手 NOVELLUS CONCEPT One #9194261 待售
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ID: 9194261
CVD System.
NOVELLUS CONCEPT ONE是一种革命性的新型精密加工反应堆,被广泛认为是制造、沉积和蚀刻半导体晶片的最先进、最通用的工具。该反应堆在当今最先进的半导体制造工艺中得到广泛应用,能够将多种金属、氧化物、氮化物和其他材料沉积到微观半导体晶片上。NOVELLUS CONCEPT ONE由多工艺、多基板沉积设备提供动力,便于在同一工具中实现多工艺能力。这种精密沉积过程依赖于使用原位的、SpectraLIVE™激光为基础的检测系统,该系统可实现一致的晶片对晶片和一组一组的过程数据。这一单元还可以在沉积过程中实现高精度,并能够对有机物和无机物进行严格的过程控制。CONCEPT One的核心是一种新型的磁控管溅射源,其设计目的是在沉积过程中提供极高的精度。这个来源可以调谐以提供铜、钛/钨、镍磷等材料的沉积。此外,该源还能够精确沉积氮氧化铝、氧化铝等氮氧化物材料。磁控管源可以在基板上对材料图样进行超细蚀刻,从而产生亚微米结构。这种先进的机器还利用先进的等离子体控制及其流行的快速热处理(RTP)工具。与传统方法相比,这种资产可以将加工时间缩短近75%。RTP能够在基板上进行均匀加热以及快速退火晶片。这样可以提高步长覆盖范围和更快的处理吞吐量。CONCEPT ONE反应堆是先进半导体制造工艺的强大工具,非常适合制造低密度和高密度的微电子器件。磁控管溅射源和RTP模型的结合确保了材料的极精确沉积,从而提高了性能和可靠性。这座革命性的反应堆是任何先进半导体制造工艺的完美工具,将有助于将工业推向一个新的高度。
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